A self-lubricating tool with atomic layer deposition soft and hard composite coating and its preparation method

A technology of atomic layer deposition, soft-hard composite, applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of short action time, easy wear of tools, thin thickness, etc. Enhanced lubrication efficiency, high consistency and continuity, reduced cutting force and cutting temperature

Active Publication Date: 2021-06-01
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Purpose of the invention: Aiming at the problems of the existing dry cutting tool surface coatings such as thin thickness, short action time, and easy wear of the tool, the present invention provides a self-lubricating tool with an atomic layer deposition soft and hard composite coating, and provides a How to prepare knives

Method used

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  • A self-lubricating tool with atomic layer deposition soft and hard composite coating and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Base material: W 18 Cr 4 V high-speed steel tool; surface self-lubricating soft coating material: MoS 2 Coating, Hard Coating Material: Nano Al 2 o 3 coating.

[0024] The preparation method of this soft and hard composite coating self-lubricating cutter is as follows:

[0025] (1) Pretreatment: Place the tool in alcohol and acetone solutions for ultrasonic cleaning for 25 minutes each for degreasing treatment; then place the tool in a plasma cleaning machine and perform plasma cleaning on its surface for 5 minutes.

[0026] (2) Deposition of Al 2 o 3 Coating: Put the cleaned tool in the ALD equipment and heat it to 420°C, alternately feed Al(CH) 3 and H 2 O precursor for Al deposition 2 o 3 coating, the pulse times of the two precursors were 0.5 s and 0.5 s, respectively. N for 30 s after the end of each precursor pulse 2 cleaning. Two of the precursors were at room temperature, and the carrier gas flow rate of the precursors was 50 sccm. After completing...

Embodiment 2

[0029] Base material: W 6 Mo 5 Cr 4 V 2High-speed steel tool; surface self-lubricating soft coating material: WS 2 Coating, Hard Coating Material: Nano Al 2 o 3 coating.

[0030] The preparation method of this soft and hard composite coating self-lubricating cutter is as follows:

[0031] (1) Pre-treatment: place the tool in alcohol and acetone solutions for ultrasonic cleaning for 15 minutes each for degreasing treatment; then place the tool in a plasma cleaning machine and perform plasma cleaning on its surface for 3 minutes.

[0032] (2) Deposition of Al 2 o 3 Coating: Place the cleaned tool in the ALD equipment and heat it to 390°C, alternately injecting Al(CH) 3 and H 2 O precursor for Al deposition 2 o 3 coating, the pulse times of the two precursors were 0.3s and 0.6s, respectively. N for 45 s after the end of each precursor pulse 2 cleaning. Two of the precursors were at room temperature, and the carrier gas flow rate of the precursors was 70 sccm. Afte...

Embodiment 3

[0035] Base material: YG6 cemented carbide; surface self-lubricating soft coating material: MoS 2 Coating, Hard Coating Material: Nano Al 2 o 3 coating.

[0036] The preparation method of this soft and hard composite coating self-lubricating cutter is as follows:

[0037] (1) Pretreatment: Place the tool in alcohol and acetone solutions for 10 minutes of ultrasonic cleaning for degreasing treatment; then place the tool in a plasma cleaning machine and perform plasma cleaning on its surface for 1 minute.

[0038] (2) Deposition of Al 2 o 3 Coating: Put the cleaned tool in the ALD equipment and heat it to 350°C, and alternately pass Al(CH) 3 and H 2 O precursor for Al deposition 2 o 3 coating, the pulse times of the two precursors were 0.1s and 0.1s, respectively. N for 20 s after the end of each precursor pulse 2 cleaning. Two of the precursors were at room temperature, and the carrier gas flow rate of the precursors was 30 sccm. After completing 2000 ALD cycles, 0....

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Abstract

The invention discloses an ALD soft-hard composite coating self-lubricating tool and a preparation method thereof. The soft-hard composite coating self-lubricating tool includes a tool matrix and a nanocomposite coating on its surface. Layer deposition technique sequentially deposits Al on the surface of the tool substrate 2 o 3 Hard coating and MoS 2 or WS 2 Self-lubricating soft coating. The preparation method comprises the following steps: (1) cleaning the tool substrate; (2) depositing Al 2 o 3 Hard coating: place the cleaned tool in the atomic layer deposition equipment, heat it to 350-450°C, and alternately pass through Al(CH) 3 and H 2 O precursor, depositing Al on the surface of the tool substrate 2 o 3 coating; (3) deposition of MoS 2 or WS 2 Soft coating: keep the temperature of the heating chamber of the atomic layer deposition equipment at 350-450°C, and alternately feed MoCl 5 and H 2 S precursor to deposit MoS 2 Coating, or alternately pass WCl 5 and H 2 S precursor to deposit WS 2 Coating, to complete the preparation of soft and hard composite coating self-lubricating tools. The overall toughness, surface hardness and self-lubricating effect of the prepared tool are greatly improved.

Description

technical field [0001] The invention relates to a cutting tool and a preparation method thereof, in particular to an atomic layer deposition soft-hard composite coating self-lubricating cutting tool and a preparation method thereof, belonging to the field of mechanical cutting tool manufacturing. Background technique [0002] Due to the high cost of cutting fluid and environmental pollution, dry cutting has become a research hotspot in green processing. However, during high-speed dry cutting, the friction between the tool and chips on the rake face is extremely severe, which generates a lot of heat, resulting in rapid wear of the tool. Therefore, there is an urgent need to research and develop new tools that are pollution-free, efficient, and have high hardness and high wear resistance to reduce friction during high-speed dry cutting and improve tool life. [0003] The Chinese patent application with application number 201110229343.1 discloses a soft-hard composite coating ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/40C23C16/30C23C16/455
CPCC23C16/305C23C16/403C23C16/45527
Inventor 刘磊杨俊杰邢又强
Owner SOUTHEAST UNIV
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