Magnetic field sensor based on silicon-based micro-ring resonator and preparation method of magnetic field sensor

A micro-ring resonator and magnetic field sensor technology, applied in the field of optical sensing, can solve the problems of unsatisfactory magnetic field sensor size, general anti-electromagnetic interference ability, unsatisfactory sensitivity, etc., and achieve strong anti-electromagnetic interference ability and high sensitivity. , the effect of optimizing the structural design

Active Publication Date: 2019-07-16
CHONGQING UNIV
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Problems solved by technology

[0003] However, the existing magnetic field sensors still have the defects of unsatisfactory size, general anti-electromagnetic interference ability and unsatisfactory sensitivity.

Method used

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  • Magnetic field sensor based on silicon-based micro-ring resonator and preparation method of magnetic field sensor
  • Magnetic field sensor based on silicon-based micro-ring resonator and preparation method of magnetic field sensor
  • Magnetic field sensor based on silicon-based micro-ring resonator and preparation method of magnetic field sensor

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Embodiment Construction

[0029] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the preferred embodiments are only for illustrating the present invention, but not for limiting the protection scope of the present invention.

[0030] see figure 1 , a structural schematic diagram of the magnetic field sensor of this embodiment, including a silicon substrate 1 , a silicon dioxide layer 2 , a straight waveguide 3 , a ring waveguide 4 and a magneto-optical thin film 5 . The silicon dioxide layer (2) is arranged on the silicon substrate (1), the straight waveguide (3) and the ring waveguide (4) are arranged on the surface of the silicon dioxide layer (2), and the inner side of the ring waveguide (4) and Ring-shaped magneto-optical films (5) are respectively arranged above.

[0031] In this embodiment, the straight waveguide (3) and the ring waveguide (4) are silicon waveguides. Both ends of th...

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Abstract

The invention discloses a magnetic field sensor based on a silicon-based micro-ring resonator. The magnetic field sensor comprises a silicon substrate, a silicon dioxide layer, a direct waveguide, a ring waveguide and a magneto-optic film. By applying an external magnetic field outside the magneto-optic film, the dielectric constant of a magneto-optic material is changed, an output harmonic peak of the magnetic field sensor based on the silicon-based micro-ring resonator drifts, and magnetic field measurement is realized. The magnetic field sensor has the characteristics of high stability, size miniaturization, high electromagnetic interference resisting ability and low manufacturing cost.

Description

technical field [0001] The present invention relates to the technical field of optical sensing, in particular to a magnetic field sensor based on a silicon-based microring resonator. Background technique [0002] Magnetic field sensors are widely used in daily life, such as power system, aerospace, automobile industry, medical biochemistry and other fields. At the same time, with the development of micro-nano technology and the maturity of micro-machine manufacturing technology, more and more attention has been paid to micro-ring resonators, which have low cost, small size, low loss, high mechanical stability and can be combined with other waveguide devices. Compatibility and other advantages, and has high research and application value in the fields of filters, sensors, optical modulators, etc., and has become one of the most promising optoelectronic integrated devices. With the development of emerging industries such as optical interconnection, integration, miniaturizatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/00
CPCG01R33/0052
Inventor 杨庆罗曼丹何彦霄刘仁远
Owner CHONGQING UNIV
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