Ceramic tube type gas sensor and preparation method thereof
A technology of gas sensor and ceramic tube, which is applied in the field of ceramic tube-type gas sensor and its preparation, can solve the problems of many steps in the preparation method, unfavorable gas response, and high preparation cost, and achieve low production cost, few manufacturing steps, and simple manufacturing steps Effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0041] A preparation method of a ceramic tubular gas sensor:
[0042] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multifunctional magnetron sputtering equipment, sputter for 40 minutes under the conditions of an argon atmosphere of 30SCCM, a pressure of 1.0Pa, room temperature, and a power of 15W, and a thickness of 696.1 nm copper metal layer, the topography of the copper metal layer on the surface of the ceramic tube after sputtering is as follows figure 1 shown;
[0043] Preparation of corrosion solution: Dissolve 3.2g NaOH in 30mL of deionized water and stir for 20min with a magnetic stirrer, then add 0.913g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;
[0044] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Ta...
Embodiment 2
[0047] A preparation method of a ceramic tubular gas sensor:
[0048] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multi-functional magnetron sputtering device, sputter for 30 minutes under the conditions of an argon atmosphere of 30SCCM, 1.0Pa pressure, room temperature, and a power of 15W, to obtain a thickness of 448.0 nm copper metal layer.
[0049] Preparation of corrosion solution: Dissolve 3.0g NaOH in 30mL of deionized water, and use a magnetic stirrer to stir for 20min, then add 0.913g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;
[0050] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Take out the corroded ceramic tube with tweezers, and rinse it with absolute ethanol and deionized water for 3 Place it in ...
Embodiment 3
[0053] A preparation method of a ceramic tubular gas sensor:
[0054] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multifunctional magnetron sputtering equipment, sputter for 50 minutes under the conditions of an argon atmosphere of 30SCCM, a pressure of 1.0Pa, room temperature, and a power of 15W to obtain a thickness of 998.2 nm copper metal layer.
[0055] Preparation of corrosion solution: Dissolve 3.2g NaOH in 30mL of deionized water and stir for 20min with a magnetic stirrer, then add 0.96g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;
[0056] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Take out the corroded ceramic tube with tweezers, and rinse it with absolute ethanol and deionized water for 3 Place it i...
PUM
| Property | Measurement | Unit |
|---|---|---|
| Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 


