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Ceramic tube type gas sensor and preparation method thereof

A technology of gas sensor and ceramic tube, which is applied in the field of ceramic tube-type gas sensor and its preparation, can solve the problems of many steps in the preparation method, unfavorable gas response, and high preparation cost, and achieve low production cost, few manufacturing steps, and simple manufacturing steps Effect

Inactive Publication Date: 2019-08-13
LANZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The main purpose of this application is to provide a novel method for preparing a ceramic tube-type gas sensor, so as to solve the problem that the preparation method of a ceramic tube-type gas sensor in the prior art has many and complicated steps, high production cost, easy waste, and unfavorable gas Response to questions

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  • Ceramic tube type gas sensor and preparation method thereof
  • Ceramic tube type gas sensor and preparation method thereof
  • Ceramic tube type gas sensor and preparation method thereof

Examples

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Effect test

Embodiment 1

[0041] A preparation method of a ceramic tubular gas sensor:

[0042] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multifunctional magnetron sputtering equipment, sputter for 40 minutes under the conditions of an argon atmosphere of 30SCCM, a pressure of 1.0Pa, room temperature, and a power of 15W, and a thickness of 696.1 nm copper metal layer, the topography of the copper metal layer on the surface of the ceramic tube after sputtering is as follows figure 1 shown;

[0043] Preparation of corrosion solution: Dissolve 3.2g NaOH in 30mL of deionized water and stir for 20min with a magnetic stirrer, then add 0.913g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;

[0044] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Ta...

Embodiment 2

[0047] A preparation method of a ceramic tubular gas sensor:

[0048] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multi-functional magnetron sputtering device, sputter for 30 minutes under the conditions of an argon atmosphere of 30SCCM, 1.0Pa pressure, room temperature, and a power of 15W, to obtain a thickness of 448.0 nm copper metal layer.

[0049] Preparation of corrosion solution: Dissolve 3.0g NaOH in 30mL of deionized water, and use a magnetic stirrer to stir for 20min, then add 0.913g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;

[0050] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Take out the corroded ceramic tube with tweezers, and rinse it with absolute ethanol and deionized water for 3 Place it in ...

Embodiment 3

[0053] A preparation method of a ceramic tubular gas sensor:

[0054] Prepare a copper metal layer on the surface of the ceramic tube: using a copper target and a high-vacuum multifunctional magnetron sputtering equipment, sputter for 50 minutes under the conditions of an argon atmosphere of 30SCCM, a pressure of 1.0Pa, room temperature, and a power of 15W to obtain a thickness of 998.2 nm copper metal layer.

[0055] Preparation of corrosion solution: Dissolve 3.2g NaOH in 30mL of deionized water and stir for 20min with a magnetic stirrer, then add 0.96g (NH 4 ) 2 S 2 o 8 , and then stirred for 30 minutes until the solution was clear and uniform;

[0056] Corrosion: Immerse the ceramic tube with a copper metal layer on the surface and corrode it for 70 minutes in the corrosive solution prepared in the previous step to obtain the corroded ceramic tube. Take out the corroded ceramic tube with tweezers, and rinse it with absolute ethanol and deionized water for 3 Place it i...

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Abstract

The invention discloses a ceramic tube type gas sensor and a preparation method thereof. The preparation method of the ceramic tube type gas sensor comprises the following steps: preparing a copper metal layer on the surface of the ceramic tube; and growing a copper oxide nano array on the surface of the copper metal layer to obtain the ceramic tube type gas sensor. According to the preparation method of the ceramic tube type gas sensor, the copper metal layer is prepared on the surface of the ceramic tube, and the copper oxide nano array grows on the surface of the copper metal layer, so thatthe purpose of preparing the copper oxide nano array on the surface of the ceramic tube to serve as the gas sensor is achieved, and the problems that the preparation method of the ceramic tube type gas sensor in the prior art is multiple and complicated in steps, high in preparation cost, easy to cause waste and not beneficial to gas response are solved.

Description

technical field [0001] The present application relates to the field of gas sensors, in particular to a ceramic tubular gas sensor and a preparation method thereof. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal, including semiconductor gas sensors, electrochemical gas sensors, catalytic combustion gas sensors, thermal conductivity gas sensors, infrared gas sensors, solid electrolyte gas sensors Wait. At present, new gas sensors have been extensively researched and developed, that is, using traditional principles of action and some new effects, using crystal materials (silicon, quartz, ceramics, etc.) Sensors and sensor systems. Among them, the ceramic tubular gas sensor is the hotspot of current research, and the focus of research is on the synthesis of different gas-sensitive materials, that is, it exhibits high response value, short response / recovery time, long-term stability an...

Claims

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Application Information

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IPC IPC(8): G01N27/12G01N27/04
CPCG01N27/048G01N27/127G01N27/128
Inventor 张振兴胡强华晓慧李艳刘国
Owner LANZHOU UNIVERSITY