Laser punching and cutting system for semiconductor materials

Abstract

The invention belongs to the field of semiconductors, and particularly relates to a laser punching and cutting system for semiconductor materials. Aiming at the problems that waste produced by existing cutting are splashed to influence the accuracy of an infrared distance measurement sensor, and the punching operation cannot be carried out conveniently by utilizing an X / Y axis, the invention provides the following scheme that the laser punching and cutting system for the semiconductor materials comprises a base, wherein an installation seat is fixedly connected to the upper end side wall of the base and is of a hollow structure; a stepping motor is fixedly connected to the inner wall of the installation seat; a ball screw matched with an output shaft of the stepping motor is rotatably connected to the inner wall of the installation seat; a sliding block is slidably arranged on the ball screw in a sleeving way; a light barrier is fixedly connected to the upper end side wall of the sliding block; and a sliding rod is fixedly connected between two side inner walls of the installation seat. The infrared distance measurement sensor measures the light barrier under the protection of the installation seat, so that the extraneous interference is reduced, and the distance measurement accuracy is improved; and through the cooperation of a worm and a worm wheel, a working table rotates so as to quickly accomplishing punching and cutting.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to a laser drilling and cutting system for semiconductor materials. Background technique [0002] A semiconductor refers to a material whose conductivity at room temperature is between that of a conductor and an insulator. Semiconductors have a wide range of applications in radios, televisions, and temperature measurement. For example, a diode is a device made of a semiconductor. A semiconductor is a material whose electrical conductivity can be controlled, ranging from an insulator to a conductor. No matter from the perspective of technology or economic development, the importance of semiconductors is enormous. The core units of most of today's electronic products, such as computers, mobile phones or digital recorders, are closely related to semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the mos...

AI Technical Summary

Problems solved by technology

[0005] A laser drilling and cutting system for semiconductor materials proposed by the present invention solves the problem that when using a laser cutting device to process semiconductors, the infrared ranging sensor is generally placed in the outside world for distance measurement, which will cause The generated waste affects the measurement accuracy of the infrared distance measuring sensor. In addition, in the prior art, the X / Y axis drives the laser cutting device to move, which is very inconvenient when drilling semiconductors, and the accuracy of drilling into a circle is also low. not high problem

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