Control system and method suitable for micro-nano dual-mode detection and processing module

A control system, micro-nano technology, applied in general control systems, control/regulation systems, program control, etc., can solve the problems of small scanning size and high cost, achieve low cost, meet design requirements, and low test environment requirements.

Active Publication Date: 2019-09-20
HARBIN INST OF TECH
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Problems solved by technology

However, AFM itself has the disadvantages of high cost and small scanning size. The development of a detection and processing system suitable for large-scale workpieces has become a current research hotspot.

Method used

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  • Control system and method suitable for micro-nano dual-mode detection and processing module
  • Control system and method suitable for micro-nano dual-mode detection and processing module
  • Control system and method suitable for micro-nano dual-mode detection and processing module

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Embodiment Construction

[0051] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.

[0052] The invention provides a control system suitable for micro-nano detection and processing modules, such as figure 1 with 2 As stated, the system includes a micro-nano dual-mode detection processing module 1, a three-coordinate workbench 2, a PZT driver, a UMAC3, a charge amplifier 4, a lock-in amplifier 5, an XY piezoelectric scanning table 6, a router 7, a host computer 8, CCD9, XY direction displacement sensor 10 and Z direction displacement sensor 11, wherein:

[0053] The micro-nano dual-mode detection and processing module 1 includes a Z-di...

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Abstract

The invention discloses a control system and method suitable for a micro-nano detection and processing module. The system includes a micro-nano dual-mode detection and processing module, a three-coordinate workbench, a PZT driver, a UMAC, a charge amplifier, a lock-in amplifier, an XY piezoelectric scanning bench, a router, an upper computer, a CCD, an XY-direction displacement sensor, and a Z-direction displacement sensor. The UMAC is selected as a control core, and characteristics of a high-performance servo ring, high scalability and a high integration degree are adopted to realize macro-micro linkage control. An analog signal mode is adopted to ensure real-time performance of signal processing and transmission, and a design requirement is satisfied. A capacitive displacement sensor signal is amplified, phase locking processing is performed, and the signal is served as a closed-loop control reference signal, a test result is accurate and the requirement to a test environment is low, and muN-level closed-loop control can be realized. Through usage of the lock-in amplifier, a noise signal in the capacitive displacement sensor test result is eliminated, which facilitates closed-loop precision control.

Description

technical field [0001] The invention relates to a control system and method suitable for a micro-nano dual-mode detection and processing module. Background technique [0002] The development of biotechnology and nanotechnology has put forward higher requirements for the detection and processing of the micro-nano field. The commercial AFM system is widely used in surface observation, size measurement, Surface roughness measurement and defect analysis have developed into general means for microscopic inspection and processing. However, AFM itself has the disadvantages of high cost and small scanning size. The development of a detection and processing system suitable for large-scale workpieces has become a current research hotspot. [0003] The force closed-loop control principle and scanning mode of the AFM system are very mature, and are widely used in the research of various micro-nano detection and processing systems. Contents of the invention [0004] The invention pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/042B82B3/00B82Y40/00G01B7/02G01B7/28
CPCB82B3/0004B82B3/0085B82Y40/00G01B7/02G01B7/28G05B19/0423G05B2219/25257
Inventor 闫永达史文博耿延泉胡振江毛立阳王桐
Owner HARBIN INST OF TECH
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