Silicon micro-nano structure-based photovoltaic device and preparation method and application thereof
A nano-structure and silicon-micro technology, applied in the field of silicon micro-nano structure-based hydrovoltaic devices and its preparation, can solve the problems of low output power and restrictions on commercial applications, and achieve high current density, excellent power output, and high sensitivity Effect
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[0030] Example 1: Preparation of silicon nanowire array hydrovoltaic device
[0031] The structure of the hydroelectric device based on the silicon micro-nano structure in the present invention includes a gate-shaped upper electrode, a silicon nano-micro-nano structure, and a back electrode. Taking a silicon nanowire array-based hydrovoltaic device as an example, its preparation method includes the following steps:
[0032] (1) Silicon wafers with different doping concentrations undergo metal-assisted chemical etching, and silicon nanowire arrays with uniform morphology and adjustable length can be obtained by adjusting the concentration of etching solution and etching temperature.
[0033] (2) By means of the film-forming process, a fully-covered silver gel electrode is prepared on the back of the silicon nanowire array, and a grid-shaped silver gel electrode is prepared on the front of the silicon nanowire array by printing.
[0034] (3) After the silver glue dries naturall...
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