A mim waveguide structure based on hybrid high quality factor
A waveguide structure, high-quality technology, applied in light guides, instruments, optics, etc., can solve problems such as Q factor instability, achieve stable Q factor, high sensitivity, and improve Q factor
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Embodiment 1
[0029] In order to solve the defect that the Q factor is unstable when the optical waveguide device of the existing waveguide optical system performs waveguide coupling. This embodiment provides a figure 1 The MIM waveguide structure based on the hybrid high quality factor shown includes a main body 1, an optical channel 2 is arranged above the main body 1; a first resonant cavity 3 is arranged above the optical channel 2; the first resonant A first resonant ring 4 is set in the cavity 3; when light enters the optical channel 2 from the entrance at the left end, surface plasmons will be excited in the optical channel 2, and are connected with the first resonant cavity 3 above, the first The resonant ring 4 is coupled, and the first resonant cavity 3 and the first resonant ring 4 each generate different plasmon resonances, and the different plasmon resonances are combined to form a hybrid plasmon resonance, so that the The MIM waveguide structure has a high Q factor, and the M...
Embodiment 2
[0036] The embodiment provides a method such as figure 2 The MIM waveguide structure based on the hybrid high quality factor shown includes a main body 1, an optical channel 2 is arranged above the main body 1; a first resonant cavity 3 is arranged above the optical channel 2; the first resonant A first resonant ring 4 is provided in the cavity 3; a second resonant cavity 5 is provided below the optical channel 2; a second resonant ring 6 is provided in the second resonant cavity 5; the first resonant ring 4 and The axes of the second resonant ring 6 are parallel. When the light enters the optical channel 2 from the entrance at the left end, the surface plasmons will be excited in the optical channel 2, and will interact with the first resonant cavity 3 above, the first resonant ring 4, and the second resonant cavity 5 above. , the second resonant ring 6 are coupled, and the first resonant cavity 3, the first resonant ring 4, the second resonant cavity 5, and the second reso...
Embodiment 3
[0040] On the basis of Example 2, such as image 3 As shown, the first resonant cavity 3 and the second resonant cavity 5 are asymmetrically arranged with the optical channel 2 as an asymmetrical axis, the resonance modes of the two resonant cavities are superimposed on each other, and the phase is adjusted by the distance to form a more complex Fano resonance, which has a good effect on refraction rate changes are more sensitive; if Figure 7 Shown is the transmission spectrum of the MIM waveguide structure based on the hybrid high quality factor.
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