An open mim waveguide structure
A waveguide structure and open-type technology, applied in the field of open-type MIM waveguide structure, can solve problems such as Q factor instability, and achieve the effects of Q factor stability, Q factor improvement, and high sensitivity
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[0028] In order to solve the defect that the Q factor is unstable when the optical waveguide device of the existing waveguide optical system performs waveguide coupling. This embodiment provides a Figure 1 ~ Figure 3 The shown open-type MIM waveguide structure includes a main body 1, an optical channel 2 is arranged above the main body 1; a resonant cavity 3 is arranged above the optical channel 2; a resonant ring 4 is arranged in the resonant cavity 3; The resonant ring 4 is provided with an opening 5; when the light enters the optical channel 2 from the entrance at the left end, surface plasmons will be excited in the optical channel 2, and are coupled with the upper resonant cavity 3 and the resonant ring 4 , the resonant cavity 3 and the resonant ring 4 each generate different plasmon resonances, and the different plasmon resonances combine to form a hybrid plasmon resonance, so that the MIM waveguide structure has a high Q factor, and The MIM waveguide structure has the...
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