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Flexible capacitive type proximity sensor based on capacitor fringe field effect, and sensing method

A proximity sensor and fringe field effect technology, used in electrical/magnetic exploration, instruments, scientific instruments, etc., can solve the problems of large size, less research on flexible proximity sensing, and difficulty in applying wearable devices, and achieve high sensitivity. Effect

Inactive Publication Date: 2019-10-18
NANJING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional proximity sensors are mainly based on the principles of infrared light, ultrasonic waves, and magnetic induction. They are non-flexible, usually large in size, and difficult to apply to wearable devices that have high requirements for flexibility and stretchability.
[0003] At present, in the field of flexible electronics, a variety of high-sensitivity flexible pressure sensors have been reported, but there are relatively few studies on flexible proximity sensing.

Method used

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  • Flexible capacitive type proximity sensor based on capacitor fringe field effect, and sensing method
  • Flexible capacitive type proximity sensor based on capacitor fringe field effect, and sensing method
  • Flexible capacitive type proximity sensor based on capacitor fringe field effect, and sensing method

Examples

Experimental program
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Effect test

Embodiment 1

[0025] Example 1: Constructing a Capacitive Proximity Sensor Using a Flat Film-like Flexible Stretchable Medium Layer

[0026] Taking the patterned electrodes of the square helical shape 1 and 3 on the upper and lower surfaces of the flexible dielectric material as an example, refer to the attached figure 1 The planar film-like flexible and stretchable dielectric layer 2 is designed to construct a capacitive proximity sensor, and the preparation steps are as follows:

[0027] (1) Pour polydimethylsiloxane prepolymer (PDMS, the commonly used model is Sylgard 184, the ratio of crosslinking agent to prepolymer is 1:10) on a plane, vacuumize, remove air bubbles, Place it for 4 hours, then put it in an oven at 50-80°C, and cure it for 2-4 hours;

[0028] (2) Remove the cured PDMS film, cut it to a suitable size, paste a physical mask plate with a spiral pattern on one side of the PDMS film, sputter a spiral metal film electrode with a thickness of 30-80 nanometers, Such as gold, ...

Embodiment 2

[0032] Example 2: Using a flexible and stretchable dielectric layer with a microstructure to construct a capacitive proximity sensor

[0033] Taking the quadrangular pyramid-shaped microstructure distributed on the square helical patterned area on the upper surface of the flexible dielectric material and the square helical patterned metal thin film electrodes on the upper and lower surfaces of the flexible dielectric material as examples, refer to the attached Figure 4 The design uses a flexible and stretchable dielectric layer with a microstructure to construct a capacitive proximity sensor. The preparation steps are:

[0034] (1) Using crystalline silicon oxide wafers, the surface is a thermal oxide layer with a thickness of about 350-450 nanometers, and the silicon oxide wafers are cleaned and dried;

[0035] (2) Spin-coat S1813 photoresist on the surface of the silicon oxide wafer, the spin-coating speed is 3000-5000 rpm, the spin-coating time is 30-60 seconds, and bake ...

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Abstract

The invention provides a flexible capacitive type proximity sensor based on a capacitor fringe field effect, comprising a flexible dielectric material having a microstructure on a planar film-shaped upper surface, a patterned electrode attached to the upper surface of the flexible dielectric material, and a patterned electrode attached to a lower surface of the flexible dielectric material; the flexible dielectric material, the electrode on the upper surface of the flexible dielectric material and the electrode on the lower surface of the flexible dielectric material provide electrical response for an approaching distance of an external object via the following steps, the external approaching object intercepts a part of a capacitor fringe field formed by the flexible dielectric material, the electrode on the upper surface of the flexible dielectric material and the electrode on the lower surface of the flexible dielectric material, the electric field strength of the capacitor is reduced, and the capacitance value is decreased, thereby generating the electrical response to the presence or proximity of the external object.

Description

technical field [0001] The invention relates to a flexible capacitive proximity sensor and a sensing method that can be applied to fields such as wearable devices, intelligent robots, and flexible electronics, and has electrical responses to surrounding objects. Background technique [0002] Proximity sensing converts the movement information and presence information of the detection object into an electrical response without direct contact with the detection object. Traditional proximity sensors are mainly based on the principles of infrared light, ultrasonic waves, and magnetic induction. They are non-flexible and usually large in size, making them difficult to apply to wearable devices that have high requirements for flexibility and stretchability. [0003] At present, in the field of flexible electronics, a variety of high-sensitivity flexible pressure sensors have been reported, but there are relatively few studies on flexible proximity sensing. Proximity sensing, as a...

Claims

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Application Information

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IPC IPC(8): G01V3/08
CPCG01V3/088
Inventor 汪慧婷潘力佳施毅
Owner NANJING UNIV
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