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Method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser

A femtosecond laser processing, periodic structure technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of short working focus, difficult to change the shape of femtosecond laser processing, etc. The environment requires simple, mask-free effects

Active Publication Date: 2019-11-08
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

However, because the laser beam is a circular Gaussian spot after being focused by the lens, and because the working focus of the large numerical aperture focusing lens is short, the shape of femtosecond laser processing is difficult to change

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  • Method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser
  • Method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser
  • Method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0033] refer to figure 1 , figure 1 It is a schematic diagram of the device for processing different sub-wavelength periodic structures by femtosecond laser of the present invention. As can be seen from the figure, the device for processing different sub-wavelength periodic structures by femtosecond laser of the present invention, along the beam output direction of femtosecond laser 1, is an energy regulator 2 and a shutter. 3. A beam expander 4 , a large numerical aperture focusing lens 5 and a sample to be processed 6 ; the sample to be processed 6 is placed on an electric moving platform 7 .

[0034] The computer 8 controls the opening and closing of the shutter 3 to realize femtosecond laser processing. The computer 8 controls the electric mobile platform 7 to precisel...

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Abstract

The invention discloses a method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser. With properties such as negative refractive index and total absorption unique from traditional materials, the sub-wavelength periodic structures gain extensive attention. As technology advances, the sub-wavelength periodic structures are gradually developed toward near infrared and visible light, that is to say, the size requirements of periodic units are generally among hundreds of nanometers, and the resonance intensities excited by different shapesare different. Femtosecond laser processing technology has the characteristics of no mask, high speed and the like, and is considered as the dominate technology to promote the development of the sub-wavelength periodic structures in the future. However, the shape of femtosecond laser processing is difficult to change because that the circular Gauss light spot is formed after the laser is focused by a lens and the working focus of the focusing lens with large numerical aperture is short. According to the method and the device, the femtosecond laser processing size is controlled within less thanone third of the unit size of the sub-wavelength microstructure by adopting the processes such as large numerical aperture and back processing, and the processing of the microstructures with different shapes such as rectangles, squares and ellipses is further achieved by means of scanning splicing. The method and the device solve the problem that the shape control of the femtosecond laser processing sub-wavelength period structural unit is difficult.

Description

technical field [0001] The invention relates to femtosecond laser processing, in particular to a method and device for processing sub-wavelength periodic structures with different shapes by using femtosecond laser. Background technique [0002] Subwavelength periodic structures have attracted extensive attention due to their unique properties that traditional materials do not possess, such as negative refractive index and total absorption of fishnet structure materials. The sub-wavelength periodic structure is coupled with the incident electromagnetic wave to excite the surface plasmon resonance to enhance the local electromagnetic field strength, which can further enhance the linear or nonlinear electromagnetic wave absorption and radiation. In addition, adjusting the shape, size and period of the subwavelength periodic structure can control the transmission of electromagnetic waves with a certain spatial distribution, spectral distribution and angular distribution. With t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/362
CPCB23K26/362
Inventor 邵建达张恺馨刘晓凤李大伟赵元安胡国行
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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