Multimode coupling in-situ microscopic spectral imaging system
A spectroscopic imaging and microscopic imaging technology, which is applied in the direction of material analysis, measuring devices, and instruments by optical means, can solve the problems of measurement errors, inability to meet a number of in-situ microscopic spectroscopy and imaging measurements, etc., to avoid measurement Deviation, to achieve the effect of in situ acquisition
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[0024] A multi-mode coupling in-situ microspectral imaging system described in the present invention is composed of an inverted microscope, an excitation light source module, an optical path switching module, a microscopic imaging and a spectrum testing module, and the excitation light source module is It consists of three parts: a Raman light source unit, a fluorescent excitation light source unit, and a reflected illumination light source unit; among them, the Raman light source unit is composed of a 532nm high-brightness semiconductor laser 1, a first lens 2, a second lens 3, and a first iris diaphragm 4. Band-pass filter 5, dichroic beam splitter 6, long-pass filter 7, first fiber coupler 8, first reflector 9 and second reflector 10; Diaphragm 15, the third reflector 16, the second adjustable reflector 17 and xenon light source 19; the reflective illumination light source unit is composed of the fourth reflector 18 and white light source 20; the optical path switching modul...
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