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Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker

A technology of numerical simulation and analysis method, applied in electrostatic sensors, electrical digital data processing, special data processing applications, etc., can solve the problems of high development cost, imperfect design theory, high design threshold, etc., to save costs and reduce sample preparation and the number of tests, the effect of lowering the threshold

Active Publication Date: 2019-11-12
ZHEJIANG ELECTRO ACOUSTIC R&D CENT CAS
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Problems solved by technology

[0004] The purpose of the present invention is to provide a numerical simulation analysis method for the basic characteristics of piezoelectric MEMS speakers, which solves the problems of imperfect design theory, high design threshold and high development cost of existing MEMS products

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  • Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker
  • Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker
  • Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker

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Embodiment Construction

[0061] The present invention will be further described below in conjunction with drawings and embodiments.

[0062] Taking a piezoelectric MEMS loudspeaker as an example, the basic characteristics of the loudspeaker in electric field, structural mechanics and sound field are analyzed by the numerical simulation method disclosed in the present invention. figure 1 Be the implementation flowchart of the present invention, concrete implementation steps are as follows:

[0063] (1) preparation

[0064] figure 2 and image 3 The three-dimensional structure diagrams of the piezoelectric MEMS speaker (simplified structure, about 6.5mm×4.5mm×1.5mm in size) and the equivalent acoustic cavity of the 711 coupler. Figure 4 It is an exploded view of the MEMS loudspeaker structure, and the loudspeaker includes a front cavity housing (1), a diaphragm (2), a piezoelectric cantilever beam (3) and a rear cavity housing (4). Figure 5 It is the piezoelectric cantilever beam structure of the...

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Abstract

The invention discloses a numerical simulation analysis method for basic characteristics of a piezoelectric MEMS loudspeaker. The method comprises the following steps: 1) establishing a simulation geometric model of the MEMS loudspeaker; 2) setting physical fields and boundary conditions, including respectively setting material models, piezoelectric constitutive relations, dampers, constraint conditions, impedance boundaries, voltage loads and the like in 'solid mechanics', 'electric fields', 'pressure acoustics, frequency domains' and 'thermo-viscous acoustics, frequency domains' physical fields; 3) defining material parameters; and 4) setting the type and the size of the grid, and dividing the grid; 5) solving and calculating: respectively solving the finite element model by adopting frequency domain and characteristic frequency researches; and (6) result post-processing: obtaining a sound pressure level frequency response curve, a sound pressure and sound pressure level distributiondiagram, a change relation of capacitance values along with frequency, the magnitude and distribution diagram of stress / strain / displacement / speed / acceleration on a vibration part, and the resonance frequency and vibration mode of the MEMS loudspeaker through post-processing.

Description

technical field [0001] The invention belongs to the field of MEMS loudspeaker design, and relates to a numerical simulation analysis method involving microelectromechanical systems (MEMS), piezoelectric effects, structural mechanics, electric fields and sound fields. By adopting the numerical simulation analysis method disclosed in the present invention, the sound pressure level frequency response curve, sound pressure and sound pressure level distribution, the variation relationship of capacitance value with frequency, and the stress / strain / displacement / velocity / acceleration on the vibrating part of the MEMS speaker can be obtained , and the resonant frequency and mode shape of the MEMS speaker. These simulation analysis results can be used to guide the structural design and improvement of MEMS speakers to improve their performance. Background technique [0002] MEMS speaker is a new type of speaker designed by combining transducer theory and MEMS technology. It has the a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50H04R29/00H04R19/00
CPCH04R29/001H04R19/005Y02T90/00
Inventor 李陆化徐楚林温周斌陆晓岳磊计敏君
Owner ZHEJIANG ELECTRO ACOUSTIC R&D CENT CAS
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