Numerical simulation analysis method for basic characteristics of piezoelectric MEMS loudspeaker

A technology of numerical simulation and analysis method, applied in electrostatic sensors, electrical digital data processing, special data processing applications, etc., can solve the problems of high development cost, imperfect design theory, high design threshold, etc., to save costs and reduce sample preparation and the number of tests, the effect of lowering the threshold
CN110442907AActive Publication Date: 2019-11-12ZHEJIANG ELECTRO ACOUSTIC R&D CENT CAS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
ZHEJIANG ELECTRO ACOUSTIC R&D CENT CAS
Publication Date
2019-11-12

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Abstract

The invention discloses a numerical simulation analysis method for basic characteristics of a piezoelectric MEMS loudspeaker. The method comprises the following steps: 1) establishing a simulation geometric model of the MEMS loudspeaker; 2) setting physical fields and boundary conditions, including respectively setting material models, piezoelectric constitutive relations, dampers, constraint conditions, impedance boundaries, voltage loads and the like in 'solid mechanics', 'electric fields', 'pressure acoustics, frequency domains' and 'thermo-viscous acoustics, frequency domains' physical fields; 3) defining material parameters; and 4) setting the type and the size of the grid, and dividing the grid; 5) solving and calculating: respectively solving the finite element model by adopting frequency domain and characteristic frequency researches; and (6) result post-processing: obtaining a sound pressure level frequency response curve, a sound pressure and sound pressure level distributiondiagram, a change relation of capacitance values along with frequency, the magnitude and distribution diagram of stress / strain / displacement / speed / acceleration on a vibration part, and the resonance frequency and vibration mode of the MEMS loudspeaker through post-processing.
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Description

technical field

[0001] The invention belongs to the field of MEMS loudspeaker design, and relates to a numerical simulation analysis method involving microelectromechanical systems (MEMS), piezoelectric effects, structural mechanics, electric fields and sound fields. By adopting the numerical simulation analysis method disclosed in the present invention, the sound pressure level frequency response curve, sound pressure and sound pressure level distribution, the variation relationship of capacitance value with frequency, and the stress / strain / displacement / velocity / acceleration on the vibrating part of the MEMS speaker can be obtained , and the resonant frequency and mode shape of the MEMS speaker. These simulation analysis results can be used to guide the structural design and improvement of MEMS speakers to improve their performance. Background technique

[0002] MEMS speaker is a new type of speaker designed by combining transducer theory and MEMS technology. It has the a...

Claims

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