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Plasma generation equipment and gas treatment equipment

A technology for plasma and generating equipment, applied in the field of plasma generating equipment, can solve the problems of unstable plasma state and shortened service life of electrode components, and achieve the effects of increasing service life, reducing cost and reducing processing efficiency

Active Publication Date: 2021-09-17
EDWARDS KOREA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, when operating a conventional plasma generating apparatus, since the position of the arc point in the arc does not change considerably, the service life of the electrode assembly including the electrodes is shortened
In addition, when a conventional plasma generating device is operated at a high voltage, the arc point may deviate from the end portion of the plasma generating device, causing the plasma state to become extremely unstable

Method used

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  • Plasma generation equipment and gas treatment equipment
  • Plasma generation equipment and gas treatment equipment
  • Plasma generation equipment and gas treatment equipment

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Embodiment Construction

[0033] Advantages and features of the present disclosure, and methods of doing so, will be clearly understood from the following description taken in conjunction with the accompanying drawings. However, the embodiments are not limited to those described, as the embodiments may be implemented in various forms. It should be noted that this embodiment is provided for full disclosure and also to allow those skilled in the art to appreciate the full scope of the embodiment. Accordingly, embodiments are to be limited only by the scope of the appended claims.

[0034] In describing the embodiments of the present disclosure, if it is determined that the detailed description of related known components or functions unnecessarily obscure the gist of the present disclosure, the detailed description thereof will be omitted. Also, terms to be described below are defined in consideration of the functions of the embodiments of the present disclosure, and may vary according to user or operat...

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Abstract

The present disclosure provides a plasma generation device, which includes: a cathode assembly including a cathode; an anode assembly including an anode having a plasma generation space therein; and one or more magnetic generators. Constructed to produce magnetism. The anode assembly has: one end portion in which a gas supply path is provided; and another end portion having an opening configured to supply the plasma generation gas to the plasma generation space. The gas supply path is configured to generate a vortex of the plasma generation gas in the plasma generation space, and the one or more magnetic force generators are arranged so as to generate a magnetic force in a direction opposite to a rotation direction of the vortex of the plasma generation gas .

Description

Technical field [0001] The present invention relates to a plasma generating device and a gas treatment device including the plasma generating device. Background technique [0002] Typically, methods used to generate plasma for treating hazardous gases (e.g., perfluorinated compounds, chlorofluorocarbons, dioxins, etc.) include impact, spark discharge, nuclear reaction, arc discharge, and the like. For arc discharge, an arc can be created by applying a high DC voltage to the space between two electrodes. The arc includes an arc point positioned on one of the electrodes. [0003] When a plasma capable gas (such as an inert gas, nitrogen, etc.) passes through the arc described above and is heated to a relatively high temperature, the gas is ionized. In this way, various reaction particles are formed, and plasma with a temperature of 1000°C or higher is generated. [0004] By injecting harmful gases into plasma with a temperature of 1000°C or higher, the harmful gases are dec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/46B01D53/32
CPCB01D53/32H05H1/40B01D2257/404B01D2259/818H05H1/3468H05H1/46B01D53/323H05H1/466H05H2245/15H05H2242/10H01J37/32055H01J37/3244H01J37/32669H01J2237/002H01J37/32H05H1/50
Inventor 崔奫修高燦奎S.马尼
Owner EDWARDS KOREA