Production apparatus for coated glass

Abstract

The invention discloses a production apparatus for coated glass, belonging to the technical field of glass manufacturing. The production apparatus for coated glass comprises a device body of a cavitystructure, a plurality of substrate tables, and sputtering tables, wherein the device body is provided with orthogonal electric and magnetic fields; targets are placed on the sputtering tables; a gassupply pipe is arranged at the lower end of the side wall of the device body; the substrate tables are located directly above the sputtering tables; the lower end surface of each of the substrate tables is fixedly connected with a first connecting shaft which is of a hollow structure, and the open end of the first connecting shaft is connected with a vacuum pump through a vacuum pump pipeline; thefirst connecting shaft is internally provided with blocking block and an elevating mechanism used for driving the blocking block to move up and down so as to block an air exhausting hole; a filteringmechanism is arranged in the part, located between the air exhausting hole and the vacuum pump pipeline, of the first connecting shaft; and the elevating mechanism and the filtering mechanism are both electrically connected with a controller. The production apparatus of the invention can effectively recover a target material through filtering of the target material with a filter screen.

Description

technical field [0001] The invention relates to the technical field of glass preparation, in particular to a coated glass production device. Background technique [0002] Coated glass is also called reflective glass. Coated glass is coated with one or more layers of metal, alloy or metal compound films on the surface of the glass to change the optical properties of the glass to meet certain requirements. Coated glass can be divided into the following categories according to the different characteristics of the product: heat reflective glass, low-emissivity glass (Low-E), conductive film glass, etc. [0003] Heat reflective glass is generally coated with one or more layers of thin films composed of metals such as chromium, titanium or stainless steel or their compounds on the surface of the glass, so that the product is rich in color, has appropriate transmittance for visible light, and has a high degree of infrared radiation. Reflectivity has a high absorption rate for ult...

AI Technical Summary

Problems solved by technology

[0005] When the vacuum magnetron sputtering method is used for planar magnetron sputtering coating on glass, the sputtered target atoms will not all be deposited on the substrate to form a film, and the excess target atoms will be removed as the argon atoms are extracted by the vacuum pump. Being drawn away from the vacuum pump line, which may cause blockage of the vacuum pump line or vacuum pump

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