A planar integrable slow-wave structure and its manufacturing method

Abstract

The invention discloses a planar integratable slow wave structure. The planar integratable slow wave structure comprises a plurality of slow wave structure units; each slow wave structure units comprise first dielectric substrates, a metal bottom plate and a metal wire; the first dielectric substrates support two ends of the metal wire; the middle of the metal wire is kept vacuum; the bottoms of the two first dielectric substrates are supported by the metal bottom plate; and the plurality of slow wave structure units are connected end to end to form a periodic structure, namely, the planar integratable slow wave structure. The processing method for the planar integratable slow wave structure comprises the following steps that: S1, in order to obtain a suspended metal wire, a required position of a dielectric substrate needs to be subjected to corrosion treatment, so that the dielectric of the middle part of the dielectric substrate can be removed, and a vacuum channel can be obtained;and S2, a photoresist, adopted as the material of a sacrificial layer, is completely deposited in the vacuum region at the middle of the dielectric. With the planar integratable slow wave structure and the manufacturing method thereof adopted, the problem that an existing structure fails to decrease the working voltage of a device and to improve the output total power and power density of a planartraveling wave tube in the prior art is solved.

Description

technical field [0001] The invention relates to the field of microwave electric vacuum technology, in particular to a planar integrable slow-wave structure and a manufacturing method thereof. Background technique [0002] The traveling wave tube is a vacuum device that transmits the DC energy of the electron beam to the traveling wave high frequency field through the interaction between the electron beam and the traveling wave high frequency field to amplify the microwave signal. In important fields such as radar, electronic countermeasures and communications (including satellite communications and high data rate communications in deep space), traveling wave tubes are a critical and irreplaceable microwave / millimeter wave power amplifier. With the continuous development of phased array radar technology in the direction of intelligence, modularization and integration, its T / R components are also increasingly miniaturized, compact and arrayed. In terms of other military and c...

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Problems solved by technology

[0005] In order to solve the problems existing in the prior art, the present invention provides a planar integrable slow wave structure and its manufacturing method, which solves the problem that the previous structure cannot reduce the working voltage of the device and improve the total output power and power density of the planar traveling wave tube. The problem

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