A low-power all-optical diode based on a silicon-based mems microring
An all-photodiode, low-power technology, used in optics, light guides, optical components, etc., can solve the problems of high power and low isolation, and achieve the effects of low power consumption, high isolation, and easy integration
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[0023] In order to make the purpose, technical solution and advantages of the present invention clearer, the embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0024] refer to figure 1 , the embodiment of the present invention provides a low-power all-optical diode based on a silicon-based MEMS microring, comprising: a silicon-based platform 1, a first microring 3, a second microring 4, a first waveguide 5, a second waveguide6.
[0025] The silicon-based platform 1 is made of silicon dioxide, which is cheap and easy to prepare, and is an important raw material for optical devices. The silicon-based platform made of silicon dioxide can reduce substrate loss and Loss due to substrate absorption. The shape of the silicon-based platform 1 is a flat cuboid, and its front surface has two equal and symmetrical grooves 2 parallel to the surface.
[0026] The first microring 3 and the second microring 4 are made of s...
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