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Bionic flexible pressure sensor based on lotus leaf micro-spinous-process/MXene composite structure

A technology of pressure sensor and composite structure, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problems of lack of wide linearity, limited mass production, high cost, etc., and achieve low response time, high stability, and high sensitivity Effect

Active Publication Date: 2019-11-26
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of them do not have wide linearity while possessing high sensitivity and are extremely insensitive to low-intensity external stimuli
In addition, there are still some technical bottlenecks, such as high cost restricting mass production, low accuracy of recognition results, etc.

Method used

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  • Bionic flexible pressure sensor based on lotus leaf micro-spinous-process/MXene composite structure
  • Bionic flexible pressure sensor based on lotus leaf micro-spinous-process/MXene composite structure
  • Bionic flexible pressure sensor based on lotus leaf micro-spinous-process/MXene composite structure

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Experimental program
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Effect test

Embodiment 1

[0033] The micro spinous process structure of PDMS lotus leaf is based on lotus leaf, using SLYGARD 184 PDMS material produced by Dow Corning, which is composed of main agent and curing agent, to prepare PDMS prepolymer for secondary soft lithography inversion molding. The preparation method comprises the following steps:

[0034] a. Cut fresh Wagyu leaves into squares (5mm×5mm), wash three times with deionized water;

[0035] b. After nitrogen drying, fix the lotus leaves on the 4-inch silicon wafer substrate with double-sided adhesive tape;

[0036] c. Use PDMS for the first pour: curing agent = 5:1 prepolymer. After the prepolymer is configured, stir evenly until it is completely mixed, and degas it in a vacuum drying oven at room temperature for 20 minutes to Remove air bubbles at room temperature;

[0037] d. Spin-coat a certain amount of PDMS prepolymer on the silicon wafer with the lotus leaf attached, and perform the uniform glue process. The speed of gear I is 300r...

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Abstract

The invention discloses a bionic flexible pressure sensor based on a lotus leaf micro-spinous-process / MXene composite structure. The sensor comprises a pressure-sensing layer being polydimethylsiloxane (PDMS) with a micro-spinous-process structure on the surface of a lotus leaf, a pressure treatment layer being a multilayer Ti2C-MXene film, and a signal output layer being a flexible electrode andbeing used for supporting and protecting the Ti2C-MXene film and outputting an electrical signal converted by the pressure signal. According to the bionic flexible pressure sensor based on a lotus leaf micro-spinous-process / MXene composite structure, the sensor has excellent characteristics of high sensitivity, wide linearity, low response time, high stability and the like without the complicatedstructure design and manufacturing process.

Description

technical field [0001] The invention belongs to the field of flexible electronics and wearable devices and the technical field of new materials, and specifically relates to a bionic flexible pressure sensor based on a lotus leaf microspinous process / MXene composite structure. Background technique [0002] Flexible electronic devices are a concept relative to the traditional solid-state hard circuits fabricated on silicon wafers. This type of electronic device can make circuits, sensors, antennas, actuators and other electronic devices that can only be realized on silicon-based hard substrates on flexible substrates in various ways. Make it have flexible characteristics while realizing the original device function. With the development of the information society and the continuous advancement of the Internet of Things technology, the depth and breadth of people's collection of surrounding environmental information has been continuously improved. As a very important informati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/00
CPCG01L1/005
Inventor 卢红亮赵学峰杭成洲张卫
Owner FUDAN UNIV
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