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An arch bridge type motion platform for X-ray detection device

A technology of detection device and motion platform, applied in the field of motion platform, can solve the problems of low resonance frequency of five-axis motion platform, easy to be excited by external environment vibration, poor anti-interference ability, etc. The effect of ease of maintenance

Active Publication Date: 2022-05-03
CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The defects of this technology are as follows: the resonant frequency of the five-axis motion platform is low, the anti-interference ability is poor, and it is easily excited by the vibration of the external environment; the cantilever structure leads to a large error in the perpendicularity of the X, Y and Z axes, which leads to the sample lifting process. Changes in the center of the middle visual field

Method used

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  • An arch bridge type motion platform for X-ray detection device
  • An arch bridge type motion platform for X-ray detection device
  • An arch bridge type motion platform for X-ray detection device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] like figure 1 , figure 2 As shown, this embodiment discloses an arch bridge type motion platform for an X-ray detection device, including a platform support frame 1, a three-axis linear motion mechanism 2 and a two-axis rotary motion mechanism 3; the platform support frame 1 includes an arch bridge Type frame 11, horizontal support frame 12 and vertical support frame 13; Described horizontal support frame 12 is provided with two, and described horizontal support frame 12 upper walls are respectively fixed with described arch bridge type frame 11 two ends; Said horizontal support frame A vertical support frame 13 is arranged between the two side walls of the frame 12 and its side wall is fixed to both ends of the vertical support frame 12; the vertical support frame 13 is a frame structure of "inverted trapezoidal shape";

[0050] like image 3 As shown, the X-ray source assembly is fixed at the middle of the top of the vertical support frame 13; the three-axis linear...

Embodiment 2

[0066] like Figure 8 As shown, the difference between this embodiment and the first embodiment is that it also includes a counterweight mechanism 4, and the counterweight mechanism 4 includes a leveling counterweight assembly 41 and a gravity compensation counterweight assembly 42; the leveling counterweight assembly 41 and the gravity compensation counterweight assembly 42 are provided with two groups, and the leveling counterweight assembly 41 of the two groups is symmetrically arranged on the front side walls at both ends of the frame body of the arch bridge type frame 11; the gravity compensation counterweight assembly of the two groups 42 are symmetrically arranged on the front and rear walls of the two ends of the arch bridge frame 11;

[0067] like Figure 9 , Figure 11 As shown, the leveling counterweight assembly 41 includes a first pulley 411, a first traction rope 412, a first connecting rod 413 and a first counterweight 414; the first pulley 411 is symmetricall...

Embodiment 3

[0072] like Figure 8 As shown, the difference between this embodiment and Embodiment 1 and Embodiment 2 is that this embodiment is also provided with a vibration isolator 5, and the vibration isolator 5 is air-floating vibration isolation or rubber vibration isolation, and the vibration isolator 5. It is fixedly arranged at the bottoms of the front and rear ends of the two vertical support frames 13; through the effect of the vibration isolator 5, the modal vibration amplitude of the arch bridge frame 11 can be effectively reduced, reducing the impact of environmental vibration on the motion platform. Impact.

[0073] The vertical support frames 13 of the present embodiment can also be arranged as two groups, and the two groups of vertical support frames 13 are symmetrically fixed between the two horizontal support frames 12, and the two sides of the three-axis linear motion mechanism 2 are respectively vertical to the two groups. The support frame 12 is fixed, and the stabi...

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Abstract

The invention discloses an arch bridge type motion platform for an X-ray detection device, which comprises a platform support frame, a three-axis linear motion mechanism and a two-axis rotary motion mechanism; the platform support frame includes an arch bridge type frame, a horizontal support frame and a vertical support frame There are two horizontal support frames, the upper wall of the horizontal support frame is respectively fixed with the two ends of the arch bridge frame; the vertical support frame is arranged between the two side walls of the horizontal support frame and its side wall is fixed with the two ends of the vertical support frame The three-axis linear motion mechanism is fixedly arranged on the inner side of the vertical support frame; the two-axis rotary motion mechanism is fixedly arranged on the lower side of the arch bridge frame frame top. In the present invention, through the setting of the arch bridge frame, the arch bridge frame is relatively uniform in internal stress distribution compared with the square frame in the prior art, so that the amplitude of the frame mode vibration shape is small, thereby increasing the resonant frequency of the frame and reducing the The impact of environmental vibration on the motion platform keeps the three-axis linear motion mechanism and the two-axis rotary mechanism stable.

Description

technical field [0001] The invention relates to the field of motion platforms, in particular to an arch bridge type motion platform used for X-ray detection devices. Background technique [0002] X-ray inspection devices are mainly oriented to the reliability inspection of integrated circuit packaging, inspecting circuits and their packaging to check the existence of defects in order to determine the cause of defects, and have important applications in the field of semiconductor packaging inspection. The development of integrated circuit technology puts forward the following requirements for X-ray detection devices: 1) High stability of the motion platform to improve detail resolution. Improve the resonant frequency of the motion platform of the X-ray detection device and the isolation of environmental vibration, suppress the excitation of environmental vibration, thereby reducing the vibration at the surface of the ray tube, worktable and detector; 2) Multi-axis movement al...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/04
CPCG01N23/04
Inventor 何张强张腊梅李旺张根烜李俊英
Owner CHINA ELECTRONIC TECH GRP CORP NO 38 RES INST
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