Self-adaptive aberration correction image scanning microscopic imaging method and device

Abstract

The invention relates to a self-adaptive aberration correction image scanning microscopic imaging method and device and belongs to the field of optical microscopic measurement. According to the self-adaptive aberration correction image scanning microscopic imaging method and device of the invention, an aberration correction system is introduced into an image scanning microscopic imaging method soas to carry out adaptive aberration correction. Before correction, a sCOMS is directly utilized to perform full-pixel pre-imaging, and a full-pixel image is utilized to form an adaptive aberration correction evaluation function. An image evaluation function is tested in real time in a correction process, and a computer is used for controlling the aberration correction system to carry out self-adaptive aberration correction. This process does not need scanning, and is quick and simple. And parameters of a pixel redistribution process are reset on the basis of the change of the evaluation function in an aberration correction process, so that the pixel redistribution process is optimized. The number of the effective pixels of the sCMOS camera in a laser scanning microscopy process is set according to residual aberration. With the method adopted, the aberration of the image scanning microscopic imaging system can be effectively corrected, the effectiveness of the pixel redistribution process can be improved, and the improvement of image scanning imaging resolution can be achieved to the greatest extent.

Description

technical field [0001] The invention belongs to the field of optical microscopic measurement, and mainly relates to an ultra-precise non-contact measurement method for measuring three-dimensional microstructures in micro devices, surface topography and biological samples. Background technique [0002] The resolution of conventional optical microscopy imaging techniques is limited by the diffraction limit. In response to this problem, scientists have proposed many microscopic imaging methods to improve imaging resolution. The confocal scanning microscope uses point detection, scans the sample through a focused spot, and uses an optical pinhole for apodization, which effectively improves the imaging resolution. However, due to the existence of pinholes, it also brings about the problem of lowering the imaging signal-to-noise ratio. Structured light lighting technology can improve the resolution by modulating the illumination light. However, the structured light microscopy i...

AI Technical Summary

Problems solved by technology

However, when using the image scanning microscopy imaging method to measure the depth of the sample, due to the mismatch of the refractive index, the effect of pixel redistribution is affected, and the resolution of the image scanning microscopy imaging is reduced.

Images