Hydrostatic guideway for ultraprecise aspherical forming grinder with high precision

Abstract

The invention relates to the technical field of ultraprecision machining equipment of optical elements and discloses a hydrostatic guideway for an ultraprecise aspherical forming grinder with high precision. The hydrostatic guideway comprises a guideway base, wherein a working table and pressure plates are arranged on the guideway base, and a first slide rail, a second slide rail and a third sliderail are longitudinally arranged on the guide rail base; a first slider, a second slider and a third slider are arranged on the bottom surface of the mounting plate, and a screw and nut seat is arranged on the bottom surface of the third slider; upper oil cavities are formed in the top surfaces of the first slider and the second slider, lower oil cavities are formed in the bottom surfaces, a leftoil cavity is formed in the left side wall of the third slider, and a right oil cavity is formed in the right side wall; the first slider and the first slide rail are in sliding connection, the second slider and the second slide rail are in sliding connection, and the third slider and the third slide rail are in sliding connection; and the press plates are arranged at the tops of the first sliderail and the second slide rail. The hydrostatic guideway has the characteristics of high movement precision, stable operation and high reliability.

Description

technical field [0001] The invention relates to the technical field of ultra-precision processing equipment for optical parts, in particular to a high-precision static pressure guide rail for an ultra-precision aspheric surface forming grinder. Background technique [0002] The hydrostatic guideway is a kind of linear reciprocating motion guideway in which lubricating oil with a certain pressure is input into the oil cavity on the guideway surface through a throttle to form a bearing oil film, so that the guideway surfaces are in a state of pure liquid friction; compared Compared with the traditional linear guide rail, it has little effect on the thickness of the oil film due to the change of the speed of the guide rail, and the change of the bearing load has little effect on the thickness of the oil film. The friction coefficient of the liquid friction is only about 0.005, and the oil film has good vibration resistance. and other advantages; therefore, hydrostatic guide rai...

AI Technical Summary

Problems solved by technology

[0004] 1. (3+3) scheme: Install a static pressure slider with three chambers on both sides of the bottom of the workbench (such as figure 1 shown), wherein, the static pressure slider installed on the left side of the bottom of the workbench is provided with upper oil chamber, lower oil chamber and left oil chamber, and the static pressure slider installed on the right side of the bottom of the workbench is provided with an oil supply chamber. cavity, the lower oil cavity and the right oil cavity; however, there are certain deficiencies in this scheme: the parallelism of the cavities on both sides set in the X-axis direction is the parallelism error between the left and right sides of the static pressure slider, the static pressure slider and the After the multi-stage transmission of the parallelism error between the mounting surfaces of the workbench, there is a problem of large error, and because there are three oil chambers on a static pressure slider, the thermal deformation has a great influence on the static pressure slider , resulting in poor motion accuracy of the static pressure guide rail;

[0005] 2. (4+2) scheme: Install a four-cavity static pressure slider and a two-cavity static pressure slider on both sides of the bottom of the workbench (such as figure 2 shown), in which, the four-chamber static pressure slider is used for positioning in the X and Z directions, and the two-chamber static pressure slider is used for auxiliary use; the four-chamber static pressure slider is provided with an upper oil chamber, a lower Oil chamber, left oil chamber and right oil chamber, the hydrostatic slider with two chambers has an upper oil chamber and a lower oil chamber; however, this scheme has certain deficiencies, the left oil chamber and right The oil chamber is only located on one side of the movable part, which will cause the problem of uneven force when the workbench moves. At the same time, with the increase of temperature, the degree of thermal deformation on both sides is different, and the error caused by thermal deformation will directly affect the Movement accuracy of hydrostatic guideways

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