Vertical electrode configuration structure for nanoscale phase change memory cell
A technology of phase-change memory and vertical electrodes, which is applied in the field of microelectronics, can solve problems such as tunneling and shorting, and achieve the effects of increasing the equivalent plane spacing, reducing the working current, and increasing the equivalent resistance R
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[0024] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other. The present invention will be further described in detail below in combination with specific embodiments.
[0025] As a preferred embodiment of the present invention, such as figure 1 As shown, the present invention provides a vertical electrode configuration structure for nanoscale phase change memory cells, wherein: the vertical electrode configuration structure 100 includes an upper electrode ...
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