Micro spectrometer and spectrum detection method

Abstract

The present invention is suitable for the technical field of spectrometers, and provides a micro spectrometer and a spectrum detection method. According to embodiments of the present invention, a micro spectrometer composed of an optical filter array, an optical detector and a processor is provided, the optical filter array disposed on a transmission light path of a to-be-measured light beam is used for performing optical filtering on the to-be-measured light beam, to obtain N to-be-measured light sub-beams; the optical detector disposed on an emergent light path of the optical filter array isused for detecting light intensity of the N to-be-measured light sub-beams; and the processor electrically connected to the optical detector is used for obtaining N irrelevant linear system of equations of a spectrum response function according to the light intensity of the N to-be-measured light sub-beams, and obtaining spectrum values of the N to-be-measured light sub-beams according to the N irrelevant linear system of equations, to complete spectrum detection of the to-be-measured light beam. The micro spectrometer is simple in structure, small in volume, and easy to carry.

Description

technical field [0001] The invention belongs to the technical field of spectrometers, in particular to a miniature spectrometer and a spectrum detection method. Background technique [0002] A spectrometer is a device used to measure the light intensity at different wavelengths of light, usually consisting of an entrance slit, a dispersion system, an imaging system, and one or more exit slits. Widely used in environmental detection, thin film industry, semiconductor industry, composition detection, biomedical application, fluorescence measurement, gemstone composition detection, oxygen concentration sensor, film thickness measurement, color measurement and other fields. [0003] At present, the dispersion elements such as grating elements, prism elements, and tunable filters that make up the dispersion system usually have a large size, and the size of the dispersion elements determines the size of the spectrometer to a large extent, making the spectrometer bulky and inconven...

AI Technical Summary

Problems solved by technology

[0004] In view of this, the embodiment of the present invention provides a micro-spectrometer and a spectral detection method to solve the problem that the grating elements, prism elements, tunable filters and other dispersion elements that constitute the dispersion system in the prior art usually have relatively large Size, the size of the dispersion element determines the size of the spectrometer to a large extent, making the spectrometer bulky, inconvenient to carry, not conducive to integration with the imaging system, and severely limiting the application field of the spectrometer

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