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A magnetorheological sub-aperture polishing device suitable for large-aperture optical components

A magnetorheological polishing and polishing device technology, which is applied in the direction of grinding drive devices, optical surface grinders, grinding/polishing equipment, etc., can solve the problems of low manufacturing efficiency of optical components, increase the efficiency of magnetorheological polishing, facilitate Update and improve the effect of the effective processing area

Active Publication Date: 2021-09-07
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to solve the problem of low manufacturing efficiency of large-diameter low-damage optical elements used in the field of strong lasers, and propose a magnetorheological sub-aperture polishing device based on permanent magnets

Method used

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  • A magnetorheological sub-aperture polishing device suitable for large-aperture optical components
  • A magnetorheological sub-aperture polishing device suitable for large-aperture optical components
  • A magnetorheological sub-aperture polishing device suitable for large-aperture optical components

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specific Embodiment approach 1

[0029] Specific implementation mode 1: This implementation mode is mainly aimed at flat-plate optical components and optical components with small curvature. Figure 1 to Figure 8 To illustrate this embodiment, as shown in 4, the pure iron back plate 2 is a flat plate, which is embedded into the figure 1 In the annular groove 15 of the main body 1 of the magnetorheological sub-aperture polishing device shown.

[0030] The permanent magnets in the permanent magnet array 3 are embedded in the grooves of the pure iron back plate 2 in a cross arrangement of N poles 31 and S poles 32 , and the magnetic lines of adjacent permanent magnets in the array are closed to form a magnetic field for processing. There is no permanent magnet arrangement at the center 33 of the permanent magnet array, and the permanent magnet can be adsorbed on the pure iron back plate 2 under the action of magnetic force. The groove depth of the pure iron back plate 2 is less than 20% of the thickness of the ...

specific Embodiment approach 2

[0035] Embodiment 2: Embodiment 2 is mainly aimed at large curvature and high steepness optical elements, combined with Embodiment 1 and Figure 9 Describe the second embodiment, the device assembly and use method of the second embodiment is the same as the first embodiment, the difference is that the pure iron back plate 2, the permanent magnet array 3 and the isolation plate 4 need to be changed to have a certain curvature, and the curvature is the same as Pure iron back plate-2-1, permanent magnet array-3-1 and isolation plate-4-1 whose curvature matches the workpiece to be processed.

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Abstract

The invention discloses a permanent magnet sub-aperture polishing device suitable for large-diameter optical elements, and relates to the technical field of efficient processing of high-precision optical elements, including a main body of a magnetorheological sub-aperture polishing device, a pure iron back plate, a permanent magnet array, Composed of isolation board and soft rubber ring. The magnetorheological polishing liquid enters the processing area of ​​the device through the central through hole. The magnetorheological polishing liquid diffuses to the processing area under the dual action of the delivery pressure and the centrifugal force of the device's rotation. After passing through the permanent magnet processing area, it is recovered at the outer edge of the device. Magneto-rheological polishing liquid has certain fluidity, can adapt to changes in surface curvature, and can be used to process large curvature and high steepness optical components. The number and size of permanent magnets in the permanent magnet array can be increased or decreased according to the size requirements of the processing components, which can effectively increase the contact area between the magnetorheological polishing fluid and the optical components, and can significantly improve the material removal efficiency and high precision of large-diameter and curvature optical components Modification efficiency.

Description

technical field [0001] The invention relates to the technical field of efficient processing of high-precision optical elements, in particular to a magnetorheological sub-aperture polishing device suitable for large-diameter optical elements. Background technique [0002] With the development of high-power laser optics technology, the size of optical components used in high-power laser optical systems is getting larger and larger. against photodamage threshold. Magneto-rheological polishing technology is an effective means to reduce the surface and sub-surface damage of optical components. Magnetorheological polishing technology uses the magnetorheological fluid ribbon on the polishing wheel to sweep the optical surface, so as to realize the material removal of optical components. This technology has extremely high certainty, and the processing convergence rate is very high. However, due to the small contact area between the magnetorheological fluid ribbon and the surface of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B13/00B24B1/00B24B41/04B24B47/12B24B57/02
CPCB24B1/005B24B13/00B24B41/04B24B47/12B24B57/02
Inventor 辛强刘海涛万勇建
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI