an ion source
An ion source and the same technology, applied in the field of ion sources, can solve the problems of reducing the sensitivity of mass spectrometers and reducing the collection efficiency of charged particles 140'
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[0014] The implementation of this application will be described in detail below through examples, so that the implementation process of how this application applies technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.
[0015] figure 2 It is the schematic diagram of the ion source of the embodiment of the present invention. The ion source includes a sample inlet 21 , an arc-shaped mesh electrode 22 , a spherical collision surface 23 , a skimmer 24 and a plurality of annular thin-film electrodes 25 on the inner wall of the skimmer 24 . The sample inlet 21, the arc-shaped mesh electrode 22, the spherical collision surface 23, the skimmer 24 and a plurality of annular thin-film electrodes 25 are located on the same axis, as figure 2 Shown by the dotted line AA' in. The spherical collision surface 23 and the skimmer 24 are made of insulating dielectric material. The center O of the arc-shaped mesh elect...
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