Unlock instant, AI-driven research and patent intelligence for your innovation.

A method for manufacturing an LTCC embedded hollow rectangular waveguide structure

A technology of a rectangular waveguide and a manufacturing method, which is applied in the field of microwave and millimeter wave micromechanical structure manufacturing, can solve the problem that the surface roughness is not easy to be optimized and controlled, and achieves the improvement of the interface state, dimensional accuracy and the quality of the inner cavity interface of the waveguide. The effect of improving surface smoothness

Active Publication Date: 2021-06-08
NO 54 INST OF CHINA ELECTRONICS SCI & TECH GRP
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the natural state, the inner cavity metallization interface is formed by sintering the thick film paste into porcelain, so the surface roughness is not easy to optimize control

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A method for manufacturing an LTCC embedded hollow rectangular waveguide structure
  • A method for manufacturing an LTCC embedded hollow rectangular waveguide structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0038] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0039] A method for manufacturing an LTCC embedded hollow rectangular waveguide structure, comprising the following steps:

[0040] (1) Prepare the LTCC top cover and the LTCC substrate with grooves;

[0041] (2) The grooves in the LTCC substrate are finely machined using micro-milling technology to obtain rectangular grooves with target dimensions;

[0042] (3) Use ultrasonic cleaning technology to clean the LTCC substrate processed in step (2) to remove the residue in the rectangular groove;

[0043] (4) Put the LTCC substrate cleaned in step (3) into a sintering furnace for re-sintering treatment, and improve the smoothness of the inner wall of the rectangular tank through recrystallization; the maximum temperature T of re-sintering is between 600°C and 800°C.

[0044] (5) Grinding, polishing and cleaning the LTCC top cover;

[0045] (6) ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a manufacturing method of an LTCC embedded hollow rectangular waveguide structure, which belongs to the technical field of micromechanical structure manufacturing. The method includes preparing an LTCC top cover and an LTCC substrate with grooves; using a micro-milling technology to perform fine machining on the grooves to obtain rectangular grooves; using an ultrasonic cleaning technology to clean the substrate; re-sintering the LTCC substrate; The cover is ground, polished and cleaned; the metallization of the inner wall of the rectangular groove and the outer wall area of ​​the LTCC top cover corresponding to the rectangular groove is realized; the LTCC substrate and the LTCC top cover are subjected to glass bonding and other steps. The method can reduce the roughness of the metallized interface of the inner cavity of the LTCC rectangular waveguide by more than an order of magnitude, provide support for low-loss high-frequency signal transmission, and improve the high-frequency signal transmission quality of the waveguide.

Description

technical field [0001] The invention belongs to the technical field of manufacturing microwave and millimeter wave micromechanical structures, in particular to a method for manufacturing an LTCC embedded hollow rectangular waveguide structure. [0002] technical background [0003] Microwave devices / components realized by LTCC (Low Temperature Co-fired Ceramic) technology have the characteristics of compact structure, low loss, large volume capacity and high integration. This technology combines multi-layer ceramic dielectric green ceramic sheets and printing technology to achieve multi-layer parallel manufacturing. At the same time, precious metals such as gold and silver are used as transmission wires inside LTCC, and it also has a low sintering temperature. [0004] LTCC multi-layer technology can arrange transmission lines and microwave circuits in different layers, thereby realizing a mixed multi-layer design of various microwave, millimeter-wave transmission lines and ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01P11/00
CPCH01P11/002
Inventor 严英占贾世旺赵飞卢会湘唐小平李攀峰
Owner NO 54 INST OF CHINA ELECTRONICS SCI & TECH GRP