High-sensitivity MEMS resonant temperature sensor chip

Abstract

The invention relates to a high-sensitivity MEMS resonant temperature sensor chip, and belongs to the technical field of MEMS temperature sensors. The chip comprises a quartz glass annular base and aquartz crystal resonance layer, the quartz crystal resonance layer comprises a rhombic force amplification resonator, a first quartz arm, a second quartz arm, a first anchor point and a second anchorpoint; the rhombus force amplification resonator comprises a rhombus ring and a double-end clamped quartz tuning fork; the first anchor point, the first quartz arm, the second quartz arm and the second anchor point are positioned on a short diagonal line of the rhombus ring; and the double-end clamped quartz tuning fork is positioned on the long diagonal line of the rhombus ring. When the temperature of a measured environment changes, the quartz crystal resonance layer generates thermal expansion deformation due to restriction of the annular base, large axial stress is generated in the pair ofquartz arms, and the large axial stress is amplified by the rhombic ring to act on the double-end clamped quartz tuning fork. The sensitivity of the sensor and the stability of the resonance frequency are remarkably improved, and the sensor has the advantages of being simple in structure, high in anti-interference capacity and the like.

Description

technical field [0001] The invention belongs to the technical field of MEMS temperature sensors, in particular to a high-sensitivity resonant MEMS temperature sensor chip. Background technique [0002] With the development of science and technology, industrial production has put forward higher and higher requirements for temperature measurement, such as ultra-precision constant temperature control environment, which requires temperature sensors to have high sensitivity and good anti-interference ability. With the rapid development of Micro-Electro-Mechanical-Systems (MEMS), MEMS resonant temperature sensors are emerging. This type of sensor is mainly made of the principle that the natural frequency of the resonant device changes due to temperature changes. It has Small size, quasi-digital output, strong anti-interference ability and other advantages. The materials of the resonator mainly include single crystal silicon and quartz crystal. Among them, the single crystal silic...

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Problems solved by technology

[0003] In order to solve the problem of low sensitivity of existing resonant temperature sensors, the present invention provides a high-sensitivity resonant MEMS temperature sensor chip

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