Decoupling type micro-gyroscope device for piezoelectric driving piezoelectric detection

Abstract

The invention belongs to the technical field of micro-inertial navigation instrument measuring instrument parts, and particularly relates to a decoupling type micro-gyroscope device for piezoelectricdriving piezoelectric detection. The decoupling type micro-gyroscope device for piezoelectric driving piezoelectric detection mainly comprises a supporting frame, mass blocks, a movable beam, a detection beam, a connecting block and a signal line. The mass blocks, a driving composite beam and a detection composite beam are arranged on the supporting frame; the mass blocks consist of a driving massblock, a detection mass block and a central mass block; and the driving composite beam is composed of the movable beam and the connecting block, the detection composite beam is composed of the detection beam and the connecting block, piezoelectric material structures are arranged on the driving mass block and the detection mass block, inverse piezoelectric effect driving and direct piezoelectriceffect detection are utilized, and the device is reasonable and compact in structural design, small in orthogonal coupling error and suitable for miniaturization.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial navigation instrument measuring instrument components, and in particular relates to a decoupling micro-gyroscope device for piezoelectric-driven piezoelectric detection. Background technique [0002] Gyroscope is a sensor used to measure angular rate and is one of the core devices of inertial technology. It plays an important role in modern industrial control, aerospace, national defense, consumer electronics and other fields. [0003] For micromachined gyroscopes, the quadrature error is an important factor affecting its performance. For gyroscopes with undecoupled structures, the mass block and the fixed end are connected by a two-dimensional elastic beam. A single mass block has two degrees of freedom for driving and detection, and there is serious coupling between modes; decoupled gyroscopes can be divided into single decoupled And double decoupling, the single decoupling structure gyr...

AI Technical Summary

Problems solved by technology

[0005] Through searching new materials in this field, it is found that Southeast University has applied for "Symmetric fully decoupled double-mass silicon micro-gyroscope with double tuning fork effect" (application number 201410362573.9), which uses electrostatic drive, capacitive detection, and overall structural design Complex, electrostatic driving displacement is small, the comb tooth voltage is easy to break down during detection, and it will also fail to attract during lateral impact, especially the comb manufacturing process requires extremely high precision and low yield

This patent designs a decoupling micro-gyro device for in-plane detection of tunnel magnetoresistance. The overall structure is reasonable and compact, with small orthogonal coupling error and high detection accuracy. The device innovatively applies electromagnetic drive and tunnel magnetoresistance detection to In the decoupling micro-gyroscope, this technical field has not yet been reported, and it is a technical field to be explored by the world's scientific and technological circles.

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