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Light beam deflection fine aiming driving component micromirror

A beam deflection and component micromirror technology, applied in the direction of optical components, optics, instruments, etc., can solve the problems of low control precision, low adjustment frequency, large driver volume, etc., achieve wide application prospects, solve large volume, and simple process Effect

Active Publication Date: 2020-04-07
ZHONGBEI UNIV
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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide a beam deflection fine-pointing drive component micromirror to solve the problem of large volume, low adjustment frequency and slow response speed of the space laser communication ATP fine-tracking micromirror driver. Technical bottlenecks such as low displacement resolution and low control precision

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  • Light beam deflection fine aiming driving component micromirror
  • Light beam deflection fine aiming driving component micromirror
  • Light beam deflection fine aiming driving component micromirror

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preparation example Construction

[0033] The invention discloses a method for preparing a micromirror of a beam deflection precision aiming drive component, which specifically comprises the following steps:

[0034] S1. Using the sol-gel method to heterogeneously integrate a silicon-based PLZT film 4 of 1.5-2 μm on the surface of the Pt / Ti layer of the polysilicon substrate;

[0035] see Figure 4, when the thickness of the PLZT film increases from 15 layers (1.5 μm) to 20 layers (2 μm), the phase transition hysteresis width of the PLZT film increases, and the saturation polarization increases to the maximum, which is due to the change of the microstructure of the PLZT film due to the thickness change. Due to the difference, when the number of layers is 30, the hysteresis width decreases and the polarization intensity decreases. When the thickness increases to 3 μm, the cracks are larger, the compactness is poor, and the electrical characteristics decrease.

[0036] S2. Using micro-electromechanical device pr...

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Abstract

The invention discloses a light beam deflection fine aiming driving component micromirror integrated with a driving function and a light reflection function. The micromirror comprises a peripheral base with a hollow interior, Pt is etched out at four corners of the peripheral base to serve as lower electrodes, a four-cantilever structure is arranged in the center of the peripheral base, a micromirror is arranged over the four-cantilever structure and the central base of the peripheral base, a metal layer Au is sputtered and deposited in the square frame of the micromirror, and an upper electrode Au is arranged on a cantilever beam. The light beam deflection fine aiming driving component micromirror is reasonable in structure and simple in process, is integrated with the riving function andthe light reflection function, effectively solves the technical bottlenecks of the large size, the low adjusting frequency, the low response speed, the low displacement resolution, the poor reliability and the like of a fine aiming execution device micromirror in an existing space optical communication ATP fine tracking system, is suitable for space optical communication light beam deflection fine aiming and driving, and achieves accurate control over light beam rapid alignment.

Description

technical field [0001] The invention belongs to the technical field of fine tracking of space laser communication, and in particular relates to a micromirror of a beam deflection fine aiming driving component. Background technique [0002] In space laser communication FSO (Free Space Optical Communication), fast and accurate acquisition, tracking and targeting (ATP) is the premise to ensure long-distance space optical communication. It is the most critical core in the space optical communication system and is the most difficult to solve of a technology. The high-frequency fine tracking system is a subsystem of the ATP system, which compensates the errors of the rough tracking system to meet the final alignment and tracking accuracy requirements of the ATP system. The galvanometer is the fine-pointing actuator of the ATP fine-tracking system. Its main function is to realize the precise control of the rapid alignment of the beam. It requires a response in the order of microse...

Claims

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Application Information

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IPC IPC(8): G02B26/08
CPCG02B26/0833
Inventor 安坤孟江何建龙杨良兴刘玠王亚峰
Owner ZHONGBEI UNIV
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