Tetrachlorosilane hydrogenation system and method for preparing trichlorosilane by using same
A tetrachlorosilane, hydrogenation reaction technology, applied in chemical instruments and methods, halogenated silanes, silicon compounds, etc., can solve the problems of high technical requirements, equipment and pipeline blockage, low energy consumption conversion rate, etc., to improve the reaction efficiency. , The effect of reducing erosion corrosion and improving quality
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Embodiment 1
[0074] Embodiment 1 of the present invention discloses a tetrachlorosilane hydrogenation system, which communicates with the disproportionation reaction system, including a silicon powder pretreatment unit, a tetrachlorosilane pressurization unit, a tetrachlorosilane heat exchange unit, a hydrogen pressurization unit, and a hydrogen heat exchange unit. unit, vaporization heat exchange unit, hydrogenation reaction unit, dust removal unit and condensation separation unit;
[0075] The downstream of the silicon powder pretreatment unit is connected to the hydrogenation reaction unit;
[0076] The downstream of the tetrachlorosilane pressurization unit is connected to the tetrachlorosilane heat exchange unit, the downstream of the hydrogen pressurization unit is connected to the hydrogen heat exchange unit, and the tetrachlorosilane heat exchange unit and the hydrogen heat exchange unit are respectively connected to the vaporization heat exchange unit;
[0077] The downstream of t...
Embodiment 2~4
[0116] Embodiments 2 to 4 of the present invention provide a method for preparing trichlorosilane by hydrogenating tetrachlorosilane, using the tetrachlorosilane hydrogenation system of Embodiment 1, specifically comprising the following steps:
[0117] (1) After the silicon powder is dried by the silicon powder dryer, it enters the silicon powder receiving tank, and then puts it into the silicon powder metering tank for measurement, and passes through the H 2 Pressurize to 1.0-3.2MPaG and send it to the hydrogenation reactor;
[0118] (2) Tetrachlorosilane is pressurized to 1.0-3.2MPaG after passing through the tetrachlorosilane delivery pump, heated to 100-160°C through the tetrachlorosilane superheater, and then heated to 130-180°C through the tetrachlorosilane preheater , into tetrachlorosilane vaporizer for vaporization;
[0119] The hydrogen is pressurized to 1.0-3.2MPaG through the hydrogen compressor and the hydrocompression hydrogen buffer tank, then passed through t...
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