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Method for improving thermal stability of aluminum-doped zinc oxide conductive glass

An aluminum-doped zinc oxide, conductive glass technology, applied in gaseous chemical plating, coating, metal material coating process and other directions, can solve the problems of high sensitivity, high environmental conditions, decreased conductivity, etc., and achieve a wide range of applications Prospect, low cost, simple operation process effect

Inactive Publication Date: 2020-04-10
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although, this method can make AZO thin film in N 2 In the atmosphere annealing (T≤600°C), it maintains good conductivity and high visible light transmittance, but when exposed to an oxygen-containing atmosphere at 500°C, its conductivity is still severely reduced
Chinese patent CN104979037B replaces the pure silver metal layer with a silver alloy layer, which can inhibit the condensation effect of the metal layer film due to heat and the diffusion of silver atoms to the semiconductor layer, and enhance the thermal stability of the transparent conductive film of the traditional semiconductor-metal-semiconductor structure, but The thickness of each layer needs to be precisely controlled, and the sensitivity and environmental conditions of the corresponding growth and testing equipment are high, and the temperature resistance does not exceed 300°C

Method used

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  • Method for improving thermal stability of aluminum-doped zinc oxide conductive glass
  • Method for improving thermal stability of aluminum-doped zinc oxide conductive glass
  • Method for improving thermal stability of aluminum-doped zinc oxide conductive glass

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] (1) Clean the AZO conductive glass with alcohol ultrasonically for 10 minutes, then with deionized water for 1 minute, then with acetone for 5 minutes, and finally with deionized cleaning for 1 minute, so as to obtain AZO conductive glass with a cleaner surface.

[0026] (2) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 6 cm, so that The distance between the zinc source and the substrate is controlled at 5cm, and the corundum boat is sent to the center of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The outlet end of the tube furnace. Subsequently, the tube furnace was evacuated, and the argon gas with a flow rate of 50 sccm was introduced for purgi...

Embodiment 2

[0032](1) Clean the AZO conductive glass with alcohol ultrasonically for 10 minutes, then with deionized water for 1 minute, then with acetone for 5 minutes, and finally with deionized cleaning for 1 minute, so as to obtain AZO conductive glass with a cleaner surface.

[0033] (2) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 4 cm, so that The distance between the zinc source and the substrate is controlled at 3cm, and the corundum boat is sent to the central position of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The gas outlet of the tube furnace. Subsequently, the tube furnace was evacuated, and the argon gas with a flow rate of 50 sccm was introduced ...

Embodiment 3

[0039] (5) The AZO conductive glass was ultrasonically cleaned with alcohol for 10 min, then deionized water for 1 min, then acetone for 5 min, and finally deionized for 1 min to obtain AZO conductive glass with a cleaner surface.

[0040] (6) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 9 cm, so that The distance between the zinc source and the substrate is controlled at 8cm, and the corundum boat is sent to the central position of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The gas outlet of the tube furnace. Subsequently, the tube furnace was evacuated, and argon gas with a flow rate of 50 sccm was introduced for purging, and the vacuum was evacuated ...

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Abstract

The invention discloses a method for improving the thermal stability of aluminum-doped zinc oxide conductive glass, and relates to a transparent conductive material. The method comprises the followingsteps: sequentially carrying out ultrasonic cleaning on AZO conductive glass through alcohol, acetone and deionized water, putting the cleaned AZO conductive glass and zinc powder into a corundum boat together, putting the corundum boat into a chemical vapor deposition system, carrying out vacuumizing, carrying out purging for at least three times in an inert atmosphere, and carrying out vacuumizing again to the range of 1-10mbar; raising the temperature of the chemical vapor deposition system at the speed of 5-20 DEG C / min, and introducing mixed gas into the system for reaction after the temperature of the AZO conductive glass reaches a certain set temperature within 500-700 DEG C; after the reaction is finished, stopping introducing the mixed gas, and naturally cooling to deposit a zincoxide layer with uniform and continuous thickness on the AZO conductive glass to obtain ZnO / AZO conductive glass; and carrying out annealing in an inert atmosphere to further improve the light transmittance of the aluminum-doped zinc oxide conductive glass. The method has the advantages of simple operation process, low cost, batch growth and no pollution.

Description

technical field [0001] The invention relates to transparent conductive materials, in particular to a method for improving the thermal stability of aluminum-doped zinc oxide conductive glass. Background technique [0002] As a third-generation semiconductor material, zinc oxide (ZnO) has the advantages of wide band gap, high dielectric constant, high exciton binding energy (60meV), high thermal stability, high transparency, and good conductivity. It is expected to become an excellent transparent Conductive thin film materials (Kuang-Yang K; Yu-En H; Chien-Hsun C; et al.Dependence of lattice strainrelaxation, absorption, and sheet resistance on thickness in textured ZnO@Btransparent conductive oxide for thin-film solar cell applications[J ]. Beilstein Journal of Nanotechnology, 2016, 7:75-80.), has great application prospects in displays, thin-film solar cells, sensors, etc. (Kang, Jihye; Jo, GaeHun; Ji, Jae-Hoon; Koh, Jung-Hyuk, et al. Improved electrical properties of laser...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03C17/34C23C16/40C23C16/56
CPCC03C17/3417C03C2217/216C03C2217/24C03C2218/152C03C2218/32C23C16/407C23C16/56
Inventor 张宇锋费子琪黄煌穆瑞
Owner XIAMEN UNIV