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A method for improving thermal stability of aluminum-doped zinc oxide conductive glass

A technology of aluminum-doped zinc oxide and conductive glass, which is applied in the direction of gaseous chemical plating, coating, metal material coating technology, etc., can solve the problems of sensitivity, high environmental conditions, and decreased conductivity, and achieve wide application The effect of prospect, low cost and simple operation process

Inactive Publication Date: 2021-06-22
XIAMEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although, this method can make AZO thin film in N 2 In the atmosphere annealing (T≤600°C), it maintains good conductivity and high visible light transmittance, but when exposed to an oxygen-containing atmosphere at 500°C, its conductivity is still severely reduced
Chinese patent CN104979037B replaces the pure silver metal layer with a silver alloy layer, which can inhibit the condensation effect of the metal layer film due to heat and the diffusion of silver atoms to the semiconductor layer, and enhance the thermal stability of the transparent conductive film of the traditional semiconductor-metal-semiconductor structure, but The thickness of each layer needs to be precisely controlled, and the sensitivity and environmental conditions of the corresponding growth and testing equipment are high, and the temperature resistance does not exceed 300°C

Method used

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  • A method for improving thermal stability of aluminum-doped zinc oxide conductive glass
  • A method for improving thermal stability of aluminum-doped zinc oxide conductive glass
  • A method for improving thermal stability of aluminum-doped zinc oxide conductive glass

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] (1) Clean the AZO conductive glass with alcohol ultrasonically for 10 minutes, then with deionized water for 1 minute, then with acetone for 5 minutes, and finally with deionized cleaning for 1 minute, so as to obtain AZO conductive glass with a cleaner surface.

[0026] (2) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 6 cm, so that The distance between the zinc source and the substrate is controlled at 5cm, and the corundum boat is sent to the center of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The outlet end of the tube furnace. Subsequently, the tube furnace was evacuated, and the argon gas with a flow rate of 50 sccm was introduced for purgi...

Embodiment 2

[0032](1) Clean the AZO conductive glass with alcohol ultrasonically for 10 minutes, then with deionized water for 1 minute, then with acetone for 5 minutes, and finally with deionized cleaning for 1 minute, so as to obtain AZO conductive glass with a cleaner surface.

[0033] (2) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 4 cm, so that The distance between the zinc source and the substrate is controlled at 3cm, and the corundum boat is sent to the central position of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The gas outlet of the tube furnace. Subsequently, the tube furnace was evacuated, and the argon gas with a flow rate of 50 sccm was introduced ...

Embodiment 3

[0039] (5) The AZO conductive glass was ultrasonically cleaned with alcohol for 10 min, then deionized water for 1 min, then acetone for 5 min, and finally deionized for 1 min to obtain AZO conductive glass with a cleaner surface.

[0040] (6) Put high-purity zinc powder (purity up to 99.996%) and cleaned AZO conductive glass in a corundum boat with a total length of 10 cm, put the zinc powder at a position of 1 cm, and place the AZO conductive glass at a position of 9 cm, so that The distance between the zinc source and the substrate is controlled at 8cm, and the corundum boat is sent to the central position of the middle temperature zone of the three-temperature zone CVD tube furnace, where the zinc powder is located near the inlet end of the tube furnace, and the AZO conductive glass is near the The gas outlet of the tube furnace. Subsequently, the tube furnace was evacuated, and argon gas with a flow rate of 50 sccm was introduced for purging, and the vacuum was evacuated ...

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Abstract

A method for improving the thermal stability of an aluminum-doped zinc oxide conductive glass relates to a transparent conductive material. The AZO conductive glass is ultrasonically cleaned with alcohol, acetone and deionized water in sequence. After cleaning, it is placed in a corundum boat together with zinc powder. Put the corundum boat into the chemical vapor deposition system. After vacuuming, it is purged at least three times under an inert atmosphere. , and then vacuum again to the range of 1-10mbar; the chemical vapor deposition system heats up at a rate of 5-20°C / min, and when the temperature of the AZO conductive glass reaches a set temperature within 500-700°C, the mixed gas is introduced into the system Carry out the reaction; after the reaction is completed, stop feeding the mixed gas and lower the temperature naturally, that is, deposit a uniform and continuous thickness of zinc oxide layer on the AZO conductive glass to obtain ZnO / AZO conductive glass; annealing in an inert atmosphere can further improve the aluminum-doped oxidation. Light transmittance of zinc conductive glass. The operation process is simple, the cost is low, batch growth is possible, and there is no pollution.

Description

technical field [0001] The invention relates to transparent conductive materials, in particular to a method for improving the thermal stability of aluminum-doped zinc oxide conductive glass. Background technique [0002] As a third-generation semiconductor material, zinc oxide (ZnO) has the advantages of wide band gap, high dielectric constant, high exciton binding energy (60meV), high thermal stability, high transparency, and good conductivity. It is expected to become an excellent transparent Conductive thin film materials (Kuang-Yang K; Yu-En H; Chien-Hsun C; et al.Dependence of lattice strainrelaxation, absorption, and sheet resistance on thickness in textured ZnO@Btransparent conductive oxide for thin-film solar cell applications[J ]. Beilstein Journal of Nanotechnology, 2016, 7:75-80.), has great application prospects in displays, thin-film solar cells, sensors, etc. (Kang, Jihye; Jo, GaeHun; Ji, Jae-Hoon; Koh, Jung-Hyuk, et al. Improved electrical properties of laser...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C17/34C23C16/40C23C16/56
CPCC03C17/3417C03C2217/216C03C2217/24C03C2218/152C03C2218/32C23C16/407C23C16/56
Inventor 张宇锋费子琪黄煌穆瑞
Owner XIAMEN UNIV