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The preparation method of special-shaped ruthenium product

A special-shaped and product technology, applied in the field of preparation of special-shaped ruthenium products, can solve the problems of cracking, edge chipping, low yield, etc., and achieve the effects of reducing production cost, improving processing accuracy, and improving yield.

Active Publication Date: 2022-03-11
株洲铼因材料技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the special-shaped machining process of ruthenium products, it is very easy to cause defects such as chipping and cracking, resulting in a very low yield

Method used

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  • The preparation method of special-shaped ruthenium product

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Such as figure 1 As shown, a stepped ruthenium target with a conical surface is processed.

[0046] Take an appropriate amount of ruthenium powder and put it into the steel mold, using 5T / cm 2 The pressure is pressed and formed, and then the first sintering is carried out under the condition of 800°C, and the holding time is 6h; then rough machining is carried out to obtain a rough workpiece.

[0047] The rough workpiece is sintered for the second time, the sintering temperature is controlled at 1600°C, and the holding time is 12h; after the second sintering, there is a margin for finishing, which is 4% of the product size; then finish machining to reach the corresponding size Accuracy required.

Embodiment 2

[0049] On the basis of Example 1, in order to avoid the unevenness of the workpiece caused by the agglomeration of the ruthenium powder itself, the ruthenium powder was sieved before use and passed through a 200-mesh sieve.

[0050] Then put the sieved ruthenium powder into the steel mold, using 1T / cm 2 The pressure is pressed and formed, and then the first sintering is carried out under the condition of 1800 ° C, and the holding time is 3 hours; then rough machining is carried out to obtain a rough workpiece.

[0051] The rough workpiece is sintered for the second time, the sintering temperature is controlled at 2300°C, and the holding time is 6h; after the second sintering, there is a margin for finishing, which is 2% of the product size; then finish machining to reach the corresponding size Accuracy required.

Embodiment 3

[0053] Processing stepped ruthenium targets:

[0054] Sieve the ruthenium powder before use and pass through a 300 mesh sieve.

[0055] Then, the sieved ruthenium powder was pressed into shape by cold isostatic pressing, and the cold isostatic pressing adopted two stages of holding pressure, the first stage holding pressure was 80Mpa, and the time was 60s; the second stage holding pressure was 200Mpa, and the time was 30s.

[0056] Then carry out the first sintering under the condition of 1000 ℃, holding time for 4h; then carry out rough machining to obtain the rough workpiece.

[0057] The rough workpiece is sintered for the second time, the sintering temperature is controlled at 2000°C, and the holding time is 8h; after the second sintering, there is a margin for finishing, which is 3% of the product size; then finish machining to reach the corresponding size Accuracy required.

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Abstract

The invention provides a preparation method of special-shaped ruthenium products. The preparation method of special-shaped ruthenium products includes: pressing and molding raw materials including ruthenium powder, and then performing the first sintering and rough machining in order to obtain a rough workpiece; performing the second sintering on the rough workpiece, and then performing fine machining to obtain The special-shaped ruthenium product; the temperature of the first sintering is 800-1800°C, and the temperature of the second sintering is 1600-2300°C. The preparation method of the special-shaped ruthenium product provided by the application has high yield, high processing efficiency, short processing time and high processing precision.

Description

technical field [0001] The invention relates to the field of metal processing, in particular to a method for preparing a special-shaped ruthenium product. Background technique [0002] Ruthenium has special properties among platinum group metals. Its color is silvery white, hard and brittle, and it is not easy to be machined. The color of powder is gray or dark gray, which depends on the size of the powder particles. The melting point is 2310°C, the boiling point is 3900°C, and the density 12.30g / cm 3 . Among them, sputtering ruthenium target is one of the main uses of ruthenium. The magnetron sputtering method is one of the main technologies for preparing thin films in semiconductor circuit components. The ruthenium target is the key consumable for the magnetron sputtering film formation process in the process of manufacturing magnetic recording and capacitor components. Its quality directly determines the sputtered ruthenium film. the quality of. In terms of the qualit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34B22F5/00B22F3/10B22F3/04B22F3/03
CPCC23C14/3414B22F5/00B22F3/1017B22F3/04B22F3/03
Inventor 王龙秦寒梅
Owner 株洲铼因材料技术有限公司