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Chemomechanical processing methods to improve the optical surface quality of ge-as-se chalcogenide glasses

A technology of chalcogenide glass and chemical machinery, which is applied in optical surface grinders, metal processing equipment, grinding machine tools, etc., can solve problems such as pitting and scratches, and achieve the effect of improving processing efficiency and surface quality

Active Publication Date: 2022-04-01
TIANJIN JINHANG INST OF TECH PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The optical surface of chalcogenide glass processed by traditional cold working methods will have many surface defects such as pits and scratches

Method used

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  • Chemomechanical processing methods to improve the optical surface quality of ge-as-se chalcogenide glasses
  • Chemomechanical processing methods to improve the optical surface quality of ge-as-se chalcogenide glasses
  • Chemomechanical processing methods to improve the optical surface quality of ge-as-se chalcogenide glasses

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Experimental program
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Embodiment

[0049] Refer to attached figure 1 And the matching principle of process connection allowance, with a Ge 10 As 40 Se 50 Taking flat sample processing as an example, the specific steps are as follows:

[0050] Use 280# sand and steel disc to rough grind the plane, and reserve a margin of 0.2mm for the subsequent fine grinding in the rough grinding stage.

[0051] Use W28 grain size silicon carbide abrasive and steel disc for one fine grinding; use chemical mechanical grinding, add NaOH to W10 silicon carbide abrasive to pH = 9, and use copper disc for second fine grinding, and finally reserve 0.05mm quantity.

[0052] Use W2.5 and W1.0 aluminum oxide polishing powder and asphalt mold (82#) for rough polishing to remove the damaged layer produced by fine grinding and improve the surface quality.

[0053] The method of chemical mechanical polishing (polishing liquid: W0.3 alumina polishing powder + H 2 o 2 (10wt%)+H 2 SO 4 (pH=2) + sodium hexametaphosphate (1g / L)), use as...

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Abstract

The invention discloses a chemical mechanical processing method for improving the optical surface quality of Ge-As-Se chalcogenide glass, which comprises the following steps: the first step: grinding, the grinding includes coarse grinding and fine grinding, and the chalcogenide glass is processed by rough grinding The optical surface is preformed and surface modified to meet the index requirements; the chemical mechanical grinding method is used for fine grinding to further modify the optical surface shape and reduce the surface roughness; the second step: polishing, polishing includes rough polishing and fine polishing, through Rough polishing is used to polish the fine grinding surface step by step; fine polishing adopts chemical mechanical polishing method to obtain the final optical surface shape of chalcogenide glass that meets the requirements. The invention significantly improves the processing efficiency and surface quality of the optical surface of the chalcogenide glass by combining rough grinding, fine grinding, rough polishing and fine polishing in an orderly manner.

Description

technical field [0001] The invention belongs to the technical field of precision surface processing of infrared optical materials, and relates to a chemical mechanical processing method for improving the optical surface quality of Ge-As-Se chalcogenide glass. Background technique [0002] Chalcogenide glass is one of the commonly used lens materials for passive athermal infrared optical systems, and it is a kind of solid solution material with low hardness and large thermal expansion coefficient. The optical surface of chalcogenide glass processed by traditional cold working methods will have many surface defects such as pits and scratches. In order to improve the optical surface quality of chalcogenide glass and ensure the processing efficiency, the present invention improves the grinding and polishing processes respectively, and proposes the processing of chemical mechanical grinding and chemical mechanical polishing by selecting suitable chemical corrosion reagents and pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B13/00B24B37/04C09G1/02
CPCB24B13/0018B24B37/042B24B37/044C09G1/02
Inventor 薛栋柏王朋矫灵艳李伟皓杨津
Owner TIANJIN JINHANG INST OF TECH PHYSICS