Biological recognition module and preparation method thereof
A biometric identification and chip technology, applied in the field of biometric identification modules and their preparation, can solve problems such as easily damaged biometric identification chip functional areas, and achieve the effects of ensuring sensitive work, accurate alignment, and optimized thickness
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[0017] Such as Figure 1-Figure 9 Shown, a kind of preparation method of biological recognition module comprises the following steps:
[0018] Such as figure 1 As shown, in step 1), a substrate 101 is provided, and the substrate has an opposite first surface and a second surface; in step 2), a first dielectric layer is formed on the first surface of the substrate 101 102 , forming a conductive wiring layer 103 on the first dielectric layer 102 .
[0019] Wherein, the material of the substrate 101 is glass, ceramics, plastic or silicon. The material of the first dielectric layer 102 is one or more of silicon nitride, silicon oxynitride, silicon oxide, silicon carbide, aluminum oxide, aluminum nitride, and the first dielectric layer 102 can be a single layer or multi-layer structure, the preparation method of the first dielectric layer 102 is PECVD method, ALD method or thermal oxidation method, and the material of the conductive wiring layer 103 is one of gold, silver, coppe...
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