Wide-temperature-range nano composite structure carbon-based self-lubricating film and preparation method thereof
A nano-composite, lubricating thin film technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of high friction coefficient, large volume wear loss and low friction coefficient of W-DLC film, reaching Excellent self-lubricating performance and anti-wear performance, overcoming poor toughness, not easy to crack and peel off
Active Publication Date: 2020-04-21
XI AN JIAOTONG UNIV
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Problems solved by technology
Banerji et al. studied the tribological properties of W-DLC film on Ti-6Al-4V alloy in atmospheric environment, and found that the friction coefficient of W-DLC film was low (0.07-0.08) at 400-500°C; at 100-300°C At the intermediate temperature, due to the absence of the tungsten oxide transfer film, the friction coefficient of the W-DLC film is high (0.46-0.54), and the volume wear loss is large
In addition, Bhowmick et al. used an oxygen-enriched environment to achieve a stable low friction coefficient of W-DLC film in the temperature range of 25-500°C, but it can only achieve wide-temperature-range lubrication performance in a special atmosphere of pure oxygen.
Method used
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Embodiment 1
[0045] 1) Surface treatment of M50NiL bearing steel substrate
[0046] Grind and polish the surface of the substrate to make the surface roughness less than 0.05 μm, and then use acetone and absolute ethanol solution to perform ultrasonic cleaning for 15 minutes; after blowing the polished surface with dry nitrogen, the sample is placed in a sputtering In the vacuum chamber of the equipment, and apply a bias of -600V to the polished surface for Ar + Etched for 30min.
[0047] 2) Preparation of Cr bonding layer and WC-doped a-C gradient transition layer
[0048] A multi-target unbalanced magnetron sputtering system is used to deposit a layer of chromium metal bonding layer on the surface of the substrate treatment, the chromium target current is 3A, the bias voltage is -100V, and the deposition time is 600s; then, WC-doped amorphous is prepared on the surface of the bonding layer Carbon gradient transition layer. The specific process, the chromium target current is reduced f...
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Abstract
The invention discloses a wide-temperature-range nano composite structure carbon-based self-lubricating film and a preparation method thereof, and belongs to the technical field of coating materials.A multi-target non-equilibrium sputtering system is adopted to realize the preparation of the wide-temperature-range nano composite structure carbon-based self-lubricating film. The preparation methodsequentially comprises the following steps: treating the surface of a metal matrix, depositing a Cr bonding layer and a WC-doped a-C gradient transition layer on the surface of the matrix, and alternately depositing superlattice WC / a-C nano multi-layers and a-C nano layers on the surface of the transition layer. The nano composite structure carbon-based film has good self-lubricating performanceunder the condition of a wide temperature range of 25-350 DEG C in the atmospheric environment, the applicable temperature range of the amorphous carbon-based lubricating film is effectively improvedand the protection and lubrication requirements of the surface of the mechanical part under severe working conditions can be met.
Description
technical field [0001] The invention belongs to the technical field of coating materials, and relates to a carbon-based self-lubricating film with a wide temperature range nanocomposite structure and a preparation method thereof. Background technique [0002] Amorphous carbon (a-C) film has good chemical stability, high hardness, low friction coefficient and excellent wear resistance, so it is a kind of solid lubricant material with great potential. At present, amorphous carbon-based thin films have been successfully applied in mechanical processing, automobile, aerospace, biomedicine and other fields. [0003] However, the tribological properties of amorphous carbon films are very sensitive to changes in ambient temperature. Generally, when the temperature is higher than 150°C, its anti-friction and anti-wear properties are significantly degraded; when the temperature is higher than 300°C, it will undergo severe graphitization and oxidation reactions and completely fail. ...
Claims
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IPC IPC(8): C23C14/35C23C14/16C23C14/02C23C14/06
CPCC23C14/022C23C14/06C23C14/0605C23C14/165C23C14/352
Inventor 李泽清何卫锋张虹虹聂祥樊张广安李应红
Owner XI AN JIAOTONG UNIV