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System for treating process exhaust stream including IPA

A treatment system and exhaust flow technology, applied in the direction of gas treatment, electrostatic effect separation, use of liquid separation agent, etc., can solve the problems of a large amount of waste water, reduce and other problems, and achieve the effect of saving water and reducing concentration

Inactive Publication Date: 2020-05-01
ECO ENERGEN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is necessary to supply a large amount of supplementary water to reduce the IPA concentration in the water (circulating water) contained in the water tank 3, and at this time, there is a problem that a large amount of waste water will inevitably be generated.

Method used

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  • System for treating process exhaust stream including IPA
  • System for treating process exhaust stream including IPA
  • System for treating process exhaust stream including IPA

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Embodiment Construction

[0038] Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In describing the embodiments of the present invention, when it is judged that the specific description of the known technology or configuration can obscure the subject matter of the present invention, the relevant specific description will be omitted.

[0039] Figure 2a and Figure 2b It is a block diagram briefly showing an example of the processing procedure of the processing system of the IPA-containing process exhaust stream of the present invention. image 3 is a schematic diagram illustrating the treatment system of an IPA-containing engineered exhaust stream of the present invention. Reference, Figure 2a Showing an example of the system of the present invention, Figure 2b Show another example, Figure 2a One example is a basic example in which the process exhaust gas stream undergoes pretreatment to reduce the IPA concentration in the IPA c...

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PUM

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Abstract

A system for treating a process exhaust stream including IPA is provided. The system comprises an IPA concentration reduction unit for reducing at least the concentration of IPA in the process exhauststream, and a wet scrubber for receiving the process exhaust stream treated in the IPA concentration reduction unit and treating the same. The IPA concentration reduction unit includes a process of performing electrical precipitation after mist is sprayed, and wet filter treatment. Water used in the scrubber, having treated a stream containing low-concentration IPA, is used again in the reductionunit for treating a stream containing high-concentration IPA, and thus waste water can be reduced.

Description

technical field [0001] The invention relates to the field of engineering exhaust flow treatment, and more specifically relates to a treatment system capable of significantly reducing the generation of waste water in the treatment of engineering exhaust flow containing IPA. Background technique [0002] Generally, alcohol solvents such as IPA (Isopropyl Alcohol, isopropyl alcohol) are used as cleaning agents in various projects. In particular, IPA is widely used for cleaning semiconductor wafers due to its non-staining property in semiconductor manufacturing processes. [0003] This IPA is harmful to the human body as an alcoholic organic solvent, so it is required to thoroughly treat the engineering exhaust stream containing this substance. Treatment for this is typically in wet scrubbers where the engineered exhaust stream is contacted with water treated IPA. [0004] figure 1 A schematic diagram of a typical existing wet scrubber used to treat an IPA-containing process ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/75B01D47/06B03C3/017B01D53/78B01D46/00
CPCB01D46/00B01D47/06B01D53/75B01D53/78B03C3/017B01D46/0032B01D46/0035B01D2258/0216
Inventor 尹钟珌
Owner ECO ENERGEN