Electrolysis system for preparing arsine by electrolysis method

Abstract

The invention provides an electrolysis system for preparing arsine by an electrolysis method. The electrolysis system comprises: an electrolytic cell having a cathode chamber and an anode chamber separated by an ion semipermeable membrane, wherein the cathode chamber electrolyzes to generate arsine and hydrogen, and the anode chamber electrolyzes to generate oxygen; a cathode gas conveying pipeline connected with the cathode chamber; an anode gas conveying pipeline connected with the anode chamber; and a first pressure difference sensor arranged between the cathode gas conveying pipeline and the anode gas conveying pipeline and used for monitoring the pressure difference of the anode chamber and the cathode chamber. According to the invention, the pressure difference of the anode chamber and the cathode chamber is monitored by the first pressure difference sensor, and when the pressure difference exceeds the limit, the gas pressure in the anode chamber and / or the cathode chamber is adjusted, wherein the adjusting comprises: adjusting gas flow velocity, voltage and the like to avoid the ion semipermeable membrane from being damaged by excessive pressure difference, so that the stable quality of the gas generated by and flowing out of the cathode chamber is ensured, and the stability of the gas flow in subsequent application is ensured without deep purification so as to ensure the safe and stable operation of the system.

Description

technical field

[0001] The invention relates to the field of electron gas preparation, in particular to an electrolysis system for preparing arsine by electrolysis. Background technique

[0002] Today, with the rapid development of semiconductor industry, solar energy industry, LED industry, flat panel display industry and optical fiber industry, the range of electronic gases such as arsine is more and more widely used. Electronic gases are generally toxic gases, flammable and explosive gases, and the impurity removal and purification process is a big problem. The electrolytic method of arsine directly uses high-purity metallic arsenic or high-purity arsenic-containing raw materials, which can reduce the introduction of impurities from the raw materials and greatly simplify the purification process of arsine. Therefore, the electrolytic method of arsine is a better solution to the problem of gas supply in the future. way.

[0003] The electrolytic cell for producing arsine...

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