A helium recovery device and recovery method for leak detection of high-pressure gas cylinders
A high-pressure gas cylinder and helium gas recovery technology, which can be used in measuring devices, detecting the appearance of fluid at leakage points, testing fluid tightness, etc., can solve problems such as weak resolution, high false alarm rate, and low detection sensitivity , to achieve the effect of preventing damage and avoiding waste
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[0025] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0026] Such as figure 1 Shown, a kind of helium recovery device that is used for leak detection of high-pressure gas cylinder of the present invention is made of high-pressure gas cylinder (1), temperature measuring sensor (2,7), vacuum gauge (3,8), pressure relief controller (4), high-pressure cut-off valves (5, 9, 16, 19), gas storage container (6), fine-tuning valve (10), cold cathode ionization vacuum gauge (11), mass spectrometry chamber (12), mass spectrometer ( 13), a high vacuum pump (14), a low vacuum pump (15, 18), a low vacuum valve (17), a high-purity nitrogen source (20) and pipelines. Schematic see figure 1 , the high-pressure gas cylinder (1) is used as a recovery source, and it is a product to be inspected with a certain pressure. The working pressure is generally (10-60) MPa; The temperature of the container surface; the vacuum gauge (3...
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