Piezoelectric sensor and preparation method thereof

Abstract

The invention provides a piezoelectric sensor and a preparation method thereof. The piezoelectric sensor comprises a substrate, a plurality of piezoelectric cantilever beams and a fixed column, wherein the substrate is provided with a plurality of cavities; the piezoelectric cantilever beam is of a bimorph structure or is composed of a single-morph structure and a supporting layer, and the area ofa free end of the piezoelectric cantilever beam is larger than that of the fixed end; the fixed column is arranged in the center of the substrate and used for fixing the piezoelectric cantilever beam. According to the piezoelectric sensor provided by the invention, a new structural form of the piezoelectric cantilever beam is provided, and the substrate with a specific shape and a depth cavity iscombined, so that the performance such as the sensitivity of the sensor can be remarkably improved. The preparation method of the piezoelectric sensor comprises the following steps: processing the substrate with the cavity, and depositing and etching the supporting layer and a piezoelectric laminated layer in the piezoelectric cantilever beam on the substrate. The preparation method has the advantages of simple process and strong compatibility, and is suitable for processing piezoelectric sensors containing various piezoelectric materials and various substrates.

Description

technical field [0001] The invention relates to the field of MEMS piezoelectric devices, in particular to a piezoelectric sensor and a preparation method thereof. Background technique [0002] Piezoelectric sensors are devices based on the piezoelectric effect of piezoelectric materials for electromechanical conversion, which can be directly used to measure force or measure force-related pressure, displacement, vibration acceleration, etc. Traditional piezoelectric sensors are made of different types of quartz crystals or lead zirconate titanate (PZT) and other piezoelectric ceramics, which have the advantages of high sensitivity, stable performance, good frequency response and reliable operation. However, with the development of micro-electromechanical systems (MEMS) technology, new requirements are put forward for the size, integration manufacturing compatibility, manufacturing cost and environmental friendliness of piezoelectric sensors. A new generation of piezoelectric...

AI Technical Summary

Problems solved by technology

However, for piezoelectric sensors, when the size and thickness of the piezoelectric diaphragm are determined, it is difficult to further improve the performance of the sensor such as sensitivity and signal-to-noise ratio. On the other hand, the process of piezoelectric sensors directly affects the manufacturing of sensors. Cost, so it is necessary to streamline the manufacturing process and reduce the difficulty of manufacturing

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