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66results about How to "Strong process compatibility" patented technology

Field effect transistor gas sensor and array preparation method thereof

The invention discloses a field effect transistor gas sensor and an array preparation method thereof. The field effect transistor (FET) gas sensor is a gate-sensitive FET gas sensor with a gate electrode modified by quantum dots, and a gate-sensitive electrode layer (5) of the FET gas sensor is of a two-layer composite structure or of a single-layer structure made of a composite material. The two-layer composite structure comprises a metal film layer and a quantum dot layer deposited on the surface of the metal film layer. The single-layer structure made of a composite material is specificallya single-layer structure made of a composite material formed by combining quantum dots and a metal or metalloid material. According to the invention, improvement is made on the internal composition and structure of the gate-sensitive FET, the corresponding preparation method and the like, quantum dots are used as a gate electrode and a gas sensitive layer at the same time, and the bias voltage ofthe gate electrode and the channel modulation effect are regulated and controlled by utilizing the adsorption characteristic of a quantum dot gate-sensitive electrode to different gases. A room-temperature gas sensor with high sensitivity, low power consumption and high selectivity can be obtained, and low-concentration target gases (such as H2) can be detected.
Owner:HUAZHONG UNIV OF SCI & TECH

SiC trench gate power MOSFET device and preparation method thereof

The invention relates to a SiC trench gate power MOSFET device, and belongs to the technical field of power semiconductors. The SiC trench gate power MOSFET device comprises a trench source structure,a P-type polycrystalline silicon and a trench gate structure which are manufactured in a trench. The trench source structure can reduce gate-drain capacitance (Cgd) and switching loss, when a sourcedielectric layer is made of a high-K dielectric material, the electric field intensity of a source dielectric can be effectively reduced, the P-type polycrystalline silicon realizes integration of anHJD in the N-channel SiC trench gate power MOSFET, the HJD has lower forward conduction voltage drop, conduction of a body diode is inhibited, a reliability problem caused by bipolar degradation is avoided, and the integrated HJD does not additionally increase the area of a chip. The integrated SiCHJD is a unipolar device, the reverse recovery characteristic is superior to that of a bipolar body diode, and stability is better due to the fact that parasitic parameters brought by an external diode lead are avoided, in addition, the device is simple and controllable in manufacturing process and high in compatibility with an existing process.
Owner:HANGZHOU SILICON-MAGIC SEMICON TECH CO LTD

Methods for manufacturing phase change memory

The invention provides two methods for manufacturing a phase change memory. According to the methods, a phase change material peeling phenomenon of the phase change memory is avoided. According to the first technical scheme, the method comprises the steps that a TiON bonding layer is arranged between a phase change material and a dielectric layer covering a lower electrode, the bonding degree between the dielectric layer and the phase change material is increased through the TiON bonding layer, so that the phase change material is prevented from falling off, and therefore the reliability of the phase change memory is improved. According to the second technical scheme, the bonding layer of a side-wall shape is formed to increase the bonding performance of the phase change material, a diffusion impervious layer of the side wall and the dielectric layer of the side wall; due to the fact that the size of the bottom of the side wall is larger than the size of the top of the side wall, the size of the bottom of a space where the phase change material is deposited is made to be smaller than the size of the top of the space, the contact area of the phase change material and the lower electrode is reduced, in other words, the bonding performance of the phase change material, the diffusion impervious layer of the side wall and the dielectric layer of the side wall is increased through the bonding layer of the side-wall shape is increased, the contact area of the phase change material and the lower electrode is reduced, and an operation current is reduced.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Piezoelectric sensor and preparation method thereof

The invention provides a piezoelectric sensor and a preparation method thereof. The piezoelectric sensor comprises a substrate, a plurality of piezoelectric cantilever beams and a fixed column, wherein the substrate is provided with a plurality of cavities; the piezoelectric cantilever beam is of a bimorph structure or is composed of a single-morph structure and a supporting layer, and the area ofa free end of the piezoelectric cantilever beam is larger than that of the fixed end; the fixed column is arranged in the center of the substrate and used for fixing the piezoelectric cantilever beam. According to the piezoelectric sensor provided by the invention, a new structural form of the piezoelectric cantilever beam is provided, and the substrate with a specific shape and a depth cavity iscombined, so that the performance such as the sensitivity of the sensor can be remarkably improved. The preparation method of the piezoelectric sensor comprises the following steps: processing the substrate with the cavity, and depositing and etching the supporting layer and a piezoelectric laminated layer in the piezoelectric cantilever beam on the substrate. The preparation method has the advantages of simple process and strong compatibility, and is suitable for processing piezoelectric sensors containing various piezoelectric materials and various substrates.
Owner:武汉敏声新技术有限公司

Soft nerve probe based on mixed silica gel and preparation method thereof

The invention discloses a soft nerve probe based on mixed silica gel and a preparation method of the soft nerve probe. The preparation method comprises the following steps: mixing two or more silica gel with different Young moduli, and doping silicone oil to obtain an elastic mixed silica gel substrate; a first polymer film is deposited on an elastic mixed silica gel substrate to serve as a bottom polymer insulating layer, and wrinkles are formed automatically; the metal conducting layer is located on the bottom polymer insulating layer, and a second polymer film is deposited on the metal conducting layer to serve as a top polymer packaging layer; the two layers of polymer films are etched into a snakelike line contour through oxygen plasma reaction etching, and the flexible nerve probe contour is obtained through laser cutting of the elastic mixed silica gel substrate. The device is suitable for low-damage implantation of probes with different lengths; the bonding force between the electroplating modified material and an electrode point interface can be effectively improved, the stability of a plating layer is improved, the bonding force between the electroplating electrode modified material and the electrode interface is also effectively improved, and stable and reliable electrochemical performance is ensured.
Owner:NORTHWESTERN POLYTECHNICAL UNIV

Preparation method of indium oxide thin film transistor of low sub-threshold value amplitude of oscillation

The invention discloses a preparation method of an indium oxide thin film transistor of low sub-threshold value amplitude of oscillation, and belongs to the technical field of preparation of a semiconductor thin film transistor. According to the method, atomic layer deposition (ALD) equipment is adopted, and a layer of aluminum oxide thin film is deposited on a heavily doped silicon substrate; then by adopting a spin coating mode, the aluminum oxide thin film is uniformly coated with an indium nitrate water solution to be pre-heated at a temperature of 100-150 DEG C for 10min; then optical annealing is performed in a position of 10cm below a high-pressure mercury lamp for 1.5h to decompose indium nitrate into indium oxide; and finally, by adopting a thermal evaporation mode, an aluminum electrode is evaporated on an indium oxide thin film to obtain the thin film transistor of low sub-threshold value amplitude of oscillation. By adoption of the preparation method, the preparation technology of the existing indium oxide thin film transistor is optimized, and low cost, simple and convenient operation and environment friendly materials are realized; the high-pressure mercury lamp is adopted for performing optical annealing, so that the indium oxide thin film can be prepared at a temperature of 100 DEG C or below; and the obtained thin film transistor is relatively low in sub-threshold value amplitude of oscillation and excellent in working performance.
Owner:EAST CHINA NORMAL UNIV

Metal interconnection structure and manufacturing method thereof

The invention provides a metal interconnection structure and a manufacturing method thereof. The manufacturing method comprises the following steps of: manufacturing a metal interconnection structure on a substrate, wherein the metal interconnection structure comprises a metal wire pattern, a conductive plug and a medium layer which is filled between the metal wire pattern and the conductive plug; performing photoetching, and etching the metal interconnection structure by adopting an anisotropic dry etching method from top to bottom, and at least forming a through hole or a groove on an area which is a medium layer from top to bottom; and removing the medium layer below the metal wire pattern by adopting an isotropic removing method to form a novel metal interconnection structure, wherein the two ends of the novel metal interconnection structure are embedded into the medium layer, and other parts of the novel metal interconnection structure float in the groove or the hole. Due to the adoption of the technical scheme of the invention, certain requirements on a suspended metal interconnection structure can be met, e.g., non-matching conditions with a lens can be reduced, the light crosstalk phenomenon is reduced, and needed materials can be filled into a suspended structure.
Owner:GALAXYCORE SHANGHAI

A kind of high-performance solder wire flux for automatic soldering and preparation method thereof

ActiveCN105458552BSuccessful realization of automatic solderingFast tinningWelding/cutting media/materialsSoldering mediaElectrical resistance and conductanceOrganic acid
The invention relates to a high-performance tin wire soldering flux for automatic tin soldering and a preparation method of the high-performance tin wire soldering flux. The high-performance tin wire soldering flux is prepared from the following components in percentage by weight: 2.0-7.0% of an organic acid active agent, 1.0-5.5% of an activity enhancer, 7.0-15.0% of a solubilizer, 0.1-1.5% of a surfactant, 0.1-1.5% of an inhibitor, 0.5-1.5% of an antioxidant, and the balance being modified rosin. A tin wire made by adopting the soldering flux disclosed by the invention has the characteristics of high tin plating speed, good spreadability, low empty soldering and false soldering rate, high insulation resistance after soldering, and the like; the soldering flux is particularly suitable for automation tin soldering for assembling of electronic parts and components in specific structures, printed circuit boards in specific structures and the like, and can be widely applied for the automatic tin soldering of batteries, instruments, meters and various in-home electric appliances in the electronic / electrical industry; the production efficiency is easy to improve, and the production cost is reduced.
Owner:SHENZHEN XINGHONGTAI TIN +1

Pre-sodium-modified positive pole piece, application of pre-sodium-modified positive pole piece, sodium-ion battery and preparation method of sodium-ion battery

The invention belongs to the technical field of battery materials. The invention provides a pre-sodium-modified positive pole piece. The pre-sodium-modified positive pole piece comprises high-voltage sodium ion positive pole slurry, high-capacity sodium ion positive pole slurry and a current collector, and the thickness of the high-voltage sodium ion positive electrode slurry is 10-15% of the sum of the thicknesses of the high-voltage sodium ion positive electrode slurry and the high-capacity sodium ion positive electrode slurry. Due to the effective use of the positive electrode sodium supplementing technology, the irreversible sodium loss of the hard carbon negative electrode is reduced, the dynamic performance of the sodium ion battery is improved, and the polarization is reduced; therefore, the high-performance sodium ion battery has the initial coulombic efficiency of more than 95%, the energy density of more than 150Wh/kg, the cycle life of more than 6000 weeks, the charge-discharge capacity at-40 DEG C and the continuous discharge capacity at 30C multiplying power, and the comprehensive electrochemical performance of the sodium ion battery is improved.
Owner:溧阳中科海钠科技有限责任公司

Two-dimensional material detector based on asymmetric integration of optical microstrip antenna

The invention discloses a two-dimensional material detector based on asymmetric integration of an optical microstrip antenna. The two-dimensional material detector structurally comprises a metal reflecting surface, a dielectric spacer layer, a two-dimensional active material layer and a drain electrode integrated by a top layer source electrode and a metal grid bar. The self-driven response of themetal optical detection structure of the metal two-dimensional active photosensitive material comes from a Schottky junction between the two-dimensional material and metal contact, the asymmetry integration of the optical microstrip antenna breaks the symmetry, the light absorption of the contact junction region of the two-dimensional material is greatly enhanced through the efficient coupling ofthe optical microstrip antenna and the light field local area. the boundary of the contact junction is prolonged, the light absorption of the two-dimensional material at the other electrode is inhibited by the metal bottom surface which is very close to the two electrodes, and the light response contrast ratio near the two electrodes is as high as more than one hundred times. Under floodlight irradiation, the responsivity of the optical microstrip antenna integrated two-dimensional material is higher than that of a traditional metal grating integrated two-dimensional material by more than oneorder of magnitude.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Insulated gate bipolar transistor and preparation method thereof

The invention provides an insulated gate bipolar transistor and a preparation method thereof. The insulated gate bipolar transistor comprises an N-drift region (4), P-type base regions (5), N-buffer layers (10) and N+emitter regions (6); the P-type base regions (5) are located on the two sides of the upper surface of the N-drift region (4), and the N+emitter regions (6) are located on the upper surfaces of the P-type base regions (5) and have a set distance away from the outer sides of the P-type base regions (5); and the N-buffer layers (10) are located in the P-type base regions (5) below the N+emitter regions (6), the conduction voltage drop of the insulated gate bipolar transistor is reduced through the N-buffer layers (10), and the latch-up phenomenon of the insulated gate bipolar transistor is effectively inhibited. According to the insulated gate bipolar transistor, the carrier concentration in the drift region is improved through Schottky contact, and the distribution of carriers in the drift region of the insulated gate bipolar transistor is further improved, so that the conductivity modulation effect is enhanced, the conduction voltage drop is reduced, the firmness of theinsulated gate bipolar transistor is improved through the N-buffer layers, and the large-current turn-off capability of the insulated gate bipolar transistor is improved.
Owner:GLOBAL ENERGY INTERCONNECTION RES INST CO LTD +3

Transistor with local bottom gate and manufacturing method thereof

The invention relates to a transistor with a local bottom gate and a manufacturing method of the transistor. The transistor comprises a substrate, a low-dimensional semiconductor layer, a source electrode, a drain electrode and the local bottom gate; the local bottom gate is located on the substrate, a gate dielectric layer is arranged on the local bottom gate, the low-dimensional semiconductor layer is located on the gate dielectric layer to serve as a channel of a transistor device, the source electrode and the drain electrode are located on the two opposite sides of the low-dimensional semiconductor channel and make contact with one or more parts of the low-dimensional semiconductor layer respectively; a transition layer and an electrostatic doping layer are arranged on the source electrode, the drain electrode and the channel layer, and fixed charges are arranged in the electrostatic doping layer, so that electrostatic doping is carried out on the corresponding low-dimensional semiconductor channel layer to form an NMOS device, and meanwhile, the invention also provides a manufacturing method of the transistor. The transistor provided by the invention has the advantages of good thermal stability, accurate and controllable threshold voltage and compatibility in process, and can meet the requirements of large-scale carbon-based integrated circuit production.
Owner:BEIJING HUA TAN YUAN XIN ELECTRONICS TECH CO LTD

Device and method for remediating organically polluted soil with resistance heating coupling oxidant

The invention discloses a high-efficiency and energy-saving resistance heating coupled electric transport oxidant delivery device and method for repairing organic polluted soil, comprising a heating unit, an extraction unit, a monitoring unit and a ground treatment unit. Simply using resistance heating requires a long heating time, and simply using chemical oxidation cannot effectively transport the oxidant to the polluted area. Resistance heating can activate oxidants, increase the vapor pressure and solubility of pollutants, and promote their volatilization and dissolution, thereby improving oxidation efficiency and enhancing the contact ability with pollutants, shortening the repair period and reducing repair costs. At the same time, the oxidant can improve the efficiency of resistance heating repair, and the electric transport of oxidant can transport the oxidant to the target contaminated area to enhance precise repair, reduce the energy consumption required for resistance heating, and have strong process compatibility with resistance heating equipment. The invention can be installed according to the specific conditions of local polluted areas, has low investment cost, is suitable for repairing soil polluted by organic non-heavy metals, and has great popularization value.
Owner:RES CENT FOR ECO ENVIRONMENTAL SCI THE CHINESE ACAD OF SCI
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