Array type multi-parameter wind sensor chip substrate
A wind sensor and multi-parameter technology, applied in the field of sensors, can solve problems such as single measurement function, long thermal equilibrium time, and large thermal field influence, and achieve high measurement accuracy, fast response speed, and small size.
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[0026] The array type multi-parameter wind sensor chip substrate of this embodiment is composed of a substrate 1, n heating elements 2, m heat sensitive elements 4, and a plurality of thermal insulation grooves 3, wherein n is a natural number greater than or equal to 2, m=n+1, the substrate 1 is a circular or regular polygonal non-conducting flat plate, and n heating elements 2 symmetrical about the center are fixed on the back of the substrate 1, in the middle of every two adjacent heating elements 2, Engraved with a thermal insulation groove 3, on the front of the substrate 1, n heat sensitive elements 4 are fixed corresponding to the positions of the n heating elements 2, and a heat sensitive element 4 is fixed at the center of the front surface of the substrate 1. Between the two heat-sensitive elements 4, a heat-insulating groove 3 is engraved.
[0027] When in use, the n heating elements 2 on the sensor chip are connected in parallel, and then connected to the heating circu...
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