Capacitive acceleration transducer for bending elastic beam and manufacturing method

Abstract

The invention provides a capacitive acceleration transducer for a bending elastic beam and a manufacturing method. The transducer at least comprises a first electrode structure layer, a middle structure layer and a second electrode structure layer, wherein the first electrode structure layer and the second electrode structure layer are respectively provided with electrode lead-out through holes; the middle structure layer comprises a frame formed by an oxygen-containing silicon chip comprising a dual-device layer, mass blocks of which two sides are symmetrical, and a bending elastic beam of which one side is connected with the frame and the other side is connected with the mass blocks; anti-overload convex points and damping adjusting grooves are symmetrically formed on the two sides of the two mass blocks; and the bending elastic beams positioned in different planes are distributed in a staggered mode and are not overlapped in space. Because the bending times, the total beam length and the total beam width of the bending elastic beams can be determined based on the needs, the capacitive acceleration transducer with different sensitivities can be prepared, and the flexibility is high.

Description

technical field [0001] The invention relates to the field of micro-electro-mechanical systems (MEMS), in particular to a capacitive acceleration sensor of a bent elastic beam and a preparation method thereof. Background technique [0002] MEMS is defined as a micro-electromechanical system that integrates multiple micro-mechanisms, micro-sensors, micro-actuators, signal processing, control circuits, communication interfaces, and power supplies. This technology originates from microelectronics and is broadened and extended in the field of mechanics or mechatronics. So far, MEMS devices mainly include microsensor products with high precision, high efficiency, high reliability and low cost, which are widely used in the fields of information, automobiles, medicine, aerospace and national defense. [0003] Among MEMS sensors, the micro-accelerometer is an important inertial sensor, and it is a test device used to convert the physical signal of acceleration into an electrical sig...

AI Technical Summary

Problems solved by technology

The disadvantage of this method is that the uneven doping concentration leads to uneven beam thickness and the residual stress generated in the boron doping process will affect the performance of the acceleration sensor, such as sensitivity and linearity, etc.

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