The invention relates to a
silicon carbide plane gate
MOSFET device and a manufacturing method thereof in the technical field of semiconductors. Comprising a substrate, a drain
electrode formed on one end face of the substrate, an epitaxial layer formed on the other end face of the substrate, a current
diffusion layer formed above the epitaxial layer, an epitaxial well region formed above the epitaxial layer, a first source
contact region formed in the epitaxial well region and a
second source contact region formed in the epitaxial well region, a source
electrode is further arranged on the
second source contact region, the source
electrode is further in contact with part of the first source contact region, plane gates are arranged on the current
diffusion layer and the epitaxial well region, a first base region and a second base region are arranged in the current
diffusion layer, the first base region is completely arranged in the second base region, or the first base region is partially arranged in the second base region, and the second base region is arranged in the epitaxial well region. Oscillation of the device in the turn-off process can be reduced while the turn-off speed of the device is increased, the switching loss and
electromagnetic interference of the device are reduced, and the problem that a traditional device cannot be balanced between the switching speed and switching oscillation is solved.