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69results about How to "Improve short circuit performance" patented technology

Insulated gate bipolar transistor (IGBT) device with positive temperature coefficient emitter ballast resistance

The invention discloses an insulated gate bipolar transistor (IGBT) device with positive temperature coefficient emitter ballast resistance (EBR), and belongs to the technical field of power semiconductor devices. In a conventional IGBT device of an EBR structure, the EBR is composed of a strip-shaped N<+> emitter region strip, the resistance value of the EBR generally represents a negative-temperature coefficient, namely, the higher the temperature is, the smaller the resistance value is, saturation current of the IGBT is increased, and the short-circuit capacity of the IGBT device with the positive temperature coefficient EBR will be remarkably reduced in high-temperature environments. According to the IGBT device with the positive temperature coefficient EBR, deep energy level acceptor impurities, including In or Ti or Co or Ni, are doped into the N<+> emitter region, holes produced after ionization of the deep energy level acceptor impurities have a certain compensation effect on N-type impurities, positive temperature coefficient EBR is achieved, thus the resistance value of the EBR is increased along with rise of the temperature of the IGBT device, and the short circuit capacity and latch resistant capacity of the IGBT are improved.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA +1

Silicon carbide trench gate MOSFET and manufacturing method thereof

The invention provides a silicon carbide trench gate MOSFET and a manufacturing method thereof. The silicon carbide trench gate MOSFET comprises a substrate with a first doping type, an epitaxial layer which is formed on the substrate and has the first doping type, an epitaxial well region which is formed above the epitaxial layer and has a second doping type, a first source contact region which is formed in the epitaxial well region and has a first doping type, a second source contact region which has a second doping type, atrench gate, a source electrode and a drain electrode, wherein thetrench gate comprises a gate dielectric and a gate electrode. The silicon carbide trench gate MOSFET is characterized by comprising a concave injection type current diffusion region which wraps the bottom of a trench gate and has a first doping type, and the bottom of the injection type current diffusion region is not higher than the bottom of an epitaxial well region. The injection type current diffusion region is reasonably arranged, the saturation current of the device can be limited, meanwhile, the electric field peak value and the current position can be separated, the heating power is reduced, and the short-circuit capacity of the device is improved.
Owner:ZHEJIANG UNIV HANGZHOU GLOBAL SCI & TECH INNOVATION CENT

Low on-state loss insulated gate bipolar translator (IGBT) and manufacturing method thereof

The invention provides a low on-state loss insulated gate bipolar translator (IGBT) and a manufacturing method thereof. The IGBT comprises an active region, a terminal region and a gate region, wherein the active region comprises an N-substrate region, a gate oxidation layer, a polycrystalline silicon gate, a P-base region, an N+ emitter region, a P+ collector region, emitter metal and collector metal; the active region is a cell region; a dummy cell structure is formed in the active region; the dummy cell structure is formed by sacrificing a cellular local channel; and the cellular local channel is sacrificed by changing one or combination of more of a pressure ring layer, a field oxide layer, a polycrystal layer and a contact hole layer. According to the manufacturing method provided by the invention, an invalid cell is introduced into the active region; the PIN / PNP region distribution of the active region is changed; the conductivity modulation effect of the cell of the IGBT is optimized; the saturation voltage of the IGBT is reduced; the current density of the IGBT is improved; and the on-state loss of the IGBT is reduced. The IGBT chip manufactured by the method has advantages in the field of high power density and low on-state loss application.
Owner:GLOBAL ENERGY INTERCONNECTION RES INST CO LTD +2

Double-groove type SiC MOSFET cellular structure, device and manufacturing method

The invention discloses a double-groove type SiC MOSFET cellular structure and device and a manufacturing method thereof, the double-groove type SiC MOSFET cellular structure comprises an N + + type SiC substrate, an N-type SiC drift layer, a P type base region and an N + type source region, the N-type SiC drift layer is located above the N + + type SiC substrate and is provided with a source electrode groove and a grid electrode groove, and the bottom of the source electrode groove is provided with an N type hole blocking layer and a source electrode P + type shielding layer; an N-type current conducting layer and a grid P + type shielding layer are arranged at the bottom of the grid groove, and a grid dielectric layer and a grid electrode are arranged in the grid groove; the P-type base region and the N + type source region are located on the N-type SiC drift layer between the source trench and the gate trench and are arranged from bottom to top. Shielding of the drain voltage is further enhanced, the electric field peak value and the gate-drain capacitance of the gate dielectric layer are reduced, the reliability of the gate dielectric layer and the working frequency of the device are improved, the on-resistance of the device can be reduced, and the short-circuit capability of the device can be enhanced.
Owner:北京昕感科技有限责任公司

Diagonal through-flow square cell IGBT and manufacturing method thereof

The invention relates to the technical field of power devices, in particular to a diagonal through-flow square-cell IGBT (Insulated Gate Bipolar Transistor) and a manufacturing method thereof, aims tosolve certain problems existing in the short-circuit capability of devices in the prior art, and is technically characterized by comprising the following steps: S1, selecting a wafer substrate, depositing an initial oxide layer on the surface of the wafer substrate, opening an area needing to be etched, and forming a protection ring region; S2, removing the oxide layer to open the cell region; S3, forming a deep groove structure on the surface of the substrate; S4, forming a gate oxide layer on the surface of the substrate, depositing Polysilicon, and forming a Pw region on the surface of thesubstrate; S5, forming an Nplus region in the deep groove of the substrate; S6, forming an ILD dielectric layer on the surface of the substrate, and etching the dielectric layer to form a contact hole; S7, leading out a metal Emitter electrode; S8, forming a FieldStop layer and a Colletor layer on the back surface of the wafer substrate, and depositing a metal layer to lead out a Colletor electrode. Under the condition that conductive channels are not reduced, the distribution of the conductive channels is controlled, and at most two conductive channels are controlled to be connected, so thatthe generation of current wires is reduced.
Owner:JIANGSU HAIDONG SEMICON TECH CO LTD

Novel power module of packaging structure

PendingCN108598074AReduce package inductanceIncrease package inductanceSemiconductor/solid-state device detailsSolid-state devicesVoltage overshootCoupling
The invention discloses a novel power module of a packaging structure. The power module comprises a first direct-current side terminal, a second direct-current side terminal, an alternating-current side terminal, a first drive terminal, a second drive terminal, a first silicon carbide metallic oxide semiconductor field-effect tube, a second silicon carbide metallic oxide semiconductor field-effecttube, a diode and a base, wherein the first direct-current side terminal, the second direct-current side terminal, the alternating-current side terminal, the first drive terminal and the second driveterminal are arranged on the upper surface of the base; and the first direct-current side terminal and the second direct-current side terminal are positioned on the same axis. According to the direct-current side terminals of coaxial structures provided by the invention, the distance between the direct-current side terminals can be reduced effectively, the coupling area is increased, the mutual inductance of the direct-current side terminals is increased, the packaging inductance of the power module is reduced, the voltage overshoot of the silicon carbide MOSFETs inside the power module in switching transient and short-circuited conditions is further reduced, and the switching loss of the power module is reduced.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Bipolar punch-through semiconductor device and method for manufacturing such a semiconductor device

A method for manufacturing a bipolar punch-through semiconductor device is provided, wherein the following steps are performed (a)providing a first high-doped wafer (10) having a first and a second side (11, 2), which is doped at least on the first side (11) with first particles of the first conductivity type, (b)providing a second low-doped wafer (20) of the first conductivity type having a third and a fourth side, (c)creating a wafer laminate having a wafer laminate thickness by bonding the first wafer (10) on its first side (11) and the second wafer (20) on its fourth side (22) together, (d)performing afterwards a diffusion step,thereby creating a diffused inter- space layer (31), which comprises first sided parts of the first wafer (10) and fourth sided parts of the second wafer (20), wherein that part of the second wafer having unamended doping concentration in the finalized device forms a drift layer (2), (e)afterwards creating at least one layer of the second conductivity type on the third side (21), (f)afterwards reducing the wafer laminate thickness from the second side (12) within the inter-space layer (31) and within the second wafer (20) such that a buffer layer(3) is created, which comprises the remaining part of the wafer laminate on the fourth side (22) having higher doping concentration than the drift layer (2).
Owner:HITACHI ENERGY SWITZERLAND AG

Groove type IGBT primitive cell structure manufacturing method and groove type IGBT primitive cell structure

The invention relates to a trench-type IGBT primitive cell structure manufacturing method and a trench-type IGBT primitive cell structure, and the method comprises the steps: forming an oxide layer on a conductive single crystal wafer, and growing a locos oxide layer film on the oxide layer between two primitive cells; manufacturing a silicon groove by using the deposited oxide layer as a hard mask, growing a sacrificial oxide layer in the silicon groove for corrosion, and generating a gate oxide layer; depositing doped polycrystals, etching the polycrystals at the positions corresponding to the emitter region contact holes, doping and injecting to form a P well structure on the primitive cell, and diffusing to form a P well; injecting the arsenic impurities into the P well and diffusing the arsenic impurities to form a current region structure; depositing a doped oxide layer, forming an emitter region contact hole in the doped oxide layer, etching the emitter region contact hole to form a shallow silicon groove, enabling the shallow silicon groove to penetrate through the current region structure to extend to the P well, and injecting boron ions at the bottom of the current region structure for doping to form a boron halo ring; carrying out hole annealing after a halo ring is injected into the contact hole of the emitter region, and depositing the metal to form contact lead metal of the emitter region.
Owner:深圳深爱半导体股份有限公司

IGBT (Insulated Gate Bipolar Translator) chip with novel structure and preparation method

The invention relates to an IGBT (Insulated Gate Bipolar Translator) chip with a novel structure and a preparation method. The IGBT chip with the novel structure comprises a plurality of cellular structures, each single cellular structure sequentially comprises a chip surface area, a chip internal area and a chip back area from top to bottom; wherein the chip surface region comprises an emitter region and an oxide layer; the internal region of the chip comprises a polycrystalline silicon layer, a gate oxide layer, an N + emitter region, a P + region, a P base region, a P floating region, an N-drift region and an N-buffer region. The chip back area comprises a P + collector and a back metal electrode; a single cellular structure is an axisymmetric structure; and a plurality of shunting holes which are arranged at equal intervals are etched in the central area of the oxide layer. According to the invention, a plurality of shunt holes arranged at equal intervals are etched in the central area of the oxide layer, a hole channel is provided above the P floating region, hole carriers are prevented from gathering in the P floating region, and the short-circuit capability of the IGBT is improved under the condition of ensuring the stability of breakdown voltage.
Owner:上海睿驱微电子科技有限公司

Series converter based on Si IGBT/SiC MOS hybrid parallel devices, and fault operation control method thereof

The invention discloses a series converter based on Si IGBT / SiC MOS hybrid parallel devices, and a fault operation control method thereof. The converter is of a half-bridge structure, an upper bridge arm and a lower bridge arm are each formed by connecting (n + r) hybrid parallel devices in series, n devices maintain normal operation, r devices are used as redundancy, each hybrid parallel device is formed by connecting a SiC MOSs and b IGBTs in parallel, each IGBT / SiC MOS comprises a driver, and the converter comprises a total central controller and is responsible for driving sequence, state monitoring and control strategy adjustment of devices. If a certain power device in the converter fails, the fault operation control strategy can judge the failure position in a switching period, uploads the operation condition of the converter, and adopts the control strategy to maintain normal operation. The converter provided by the invention considers the advantages of high voltage, high power, high frequency and high power density, and the provided fault control strategy can ensure that the converter continues to operate normally under the condition of device faults, so that the fault tolerance of the system is improved.
Owner:POWERCHINA HUADONG ENG COPORATION LTD
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