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Soft nerve probe based on mixed silica gel and preparation method thereof

A silicone and nerve technology, applied in the field of biomedical electricity, can solve the problems of lack of elastic polymer substrate modulus, affecting the ductility of nerve probes, and inapplicability of soft nerve probes, etc., to achieve stable and reliable electrochemical performance, guaranteeing The electrochemical performance and morphology are kept intact

Pending Publication Date: 2022-03-25
NORTHWESTERN POLYTECHNICAL UNIV
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Problems solved by technology

However, this method lacks the control of the modulus of the elastic polymer substrate, and the polymer film covers the entire surface of the silicone substrate of the device, which affects the ductility of the neural probe, so it is not suitable for the production of soft neural probes.
[0008] In summary, the currently reported wrinkle microstructures are rarely used in soft neural probes, and by doping silicone oil and depositing Parylene C in an elastic polymer substrate composed of a single Young's modulus of silica gel, although it can Obtain enhanced wrinkled microstructure, but the Young's modulus of the elastic polymer substrate cannot be adjusted, and it is not suitable for soft neural probes of different lengths

Method used

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  • Soft nerve probe based on mixed silica gel and preparation method thereof
  • Soft nerve probe based on mixed silica gel and preparation method thereof
  • Soft nerve probe based on mixed silica gel and preparation method thereof

Examples

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preparation example Construction

[0046] The invention provides a soft nerve probe based on mixed silica gel and a preparation method thereof, which are improved based on common electrode substrate materials, thereby forming an elastic hybrid silica gel base with adjustable Young's modulus, and by depositing a parylene film , the wrinkles are formed spontaneously, and the morphology will not change with the intervention of the subsequent process, which effectively improves the specific surface area of ​​the soft nerve probe electrode point and ensures stable and reliable electrochemical performance; The polymer is etched by oxygen plasma reaction The thin film obtains the serpentine interconnect structure, and the laser cutting obtains the outline of the soft nerve probe, which maintains the high ductility of the soft nerve probe.

[0047] A soft nerve probe based on hybrid silica gel, the soft nerve probe has a serpentine interconnection structure, comprising an elastic hybrid silica gel base 1, a bottom polym...

specific Embodiment 1

[0074] like figure 1 As shown, this embodiment provides a preferred structural schematic diagram of a soft nerve probe based on hybrid silica gel, wherein the soft nerve probe is composed of an elastic hybrid silica gel base 1, a bottom polymer insulating layer 2, a metal conductive layer 3, and a top polymer layer. The material packaging layer 4, the labyrinth type wrinkle pattern 5, and the bump type wrinkle pattern 6 are composed of six parts.

[0075] like figure 2As shown, this embodiment provides a schematic diagram of a composite wrinkle microstructure formed based on mixed silica gel. The elastic mixed silica gel base 1 is to mix two or more kinds of silica gels and spin-coat, and before curing, add silicone oil and extract to obtain the elastic mixed silica gel base 1. The mass percentage of the mixed silicone oil is the elastic mixed silica gel base and the silicone oil. 30% of the total mass. A first polymer film was deposited on the elastic hybrid silicone subs...

Embodiment 2

[0096] This example provides a method for preparing a soft nerve probe based on mixed silica gel. The specific implementation steps are the same as those in Example 1. The difference is that in S3, a mixture of PDMS:Ecoflex=1:4 is used. The obtained elastic hybrid silica gel substrate, by depositing Parylene C on its surface, can obtain different wrinkle morphologies from the elastic hybrid silica gel substrate obtained by mixing PDMS:Ecoflex=1:2.

[0097] like Figure 4 As shown, a comparison of the hybrid silica-based soft nerve probes prepared by the above method (such as Figure 4 (c)) and the deposition of Parylene C on a single PDMS without pretreatment with silicone oil (as in Figure 4 (a)), and the deposition of Parylene C on a single PDMS pretreated with silicone oil (as Figure 4 In the wrinkle pattern obtained in (b), it can be seen that the amplitude of the wrinkle increases significantly, and the maximum amplitude of Parylene C deposited on PDMS without silicon...

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Abstract

The invention discloses a soft nerve probe based on mixed silica gel and a preparation method of the soft nerve probe. The preparation method comprises the following steps: mixing two or more silica gel with different Young moduli, and doping silicone oil to obtain an elastic mixed silica gel substrate; a first polymer film is deposited on an elastic mixed silica gel substrate to serve as a bottom polymer insulating layer, and wrinkles are formed automatically; the metal conducting layer is located on the bottom polymer insulating layer, and a second polymer film is deposited on the metal conducting layer to serve as a top polymer packaging layer; the two layers of polymer films are etched into a snakelike line contour through oxygen plasma reaction etching, and the flexible nerve probe contour is obtained through laser cutting of the elastic mixed silica gel substrate. The device is suitable for low-damage implantation of probes with different lengths; the bonding force between the electroplating modified material and an electrode point interface can be effectively improved, the stability of a plating layer is improved, the bonding force between the electroplating electrode modified material and the electrode interface is also effectively improved, and stable and reliable electrochemical performance is ensured.

Description

technical field [0001] The invention belongs to the technical field of biomedicine, and in particular relates to a soft nerve probe and a preparation method thereof. Background technique [0002] The rapid development and integration of brain-computer interface technology and microelectromechanical system (MEMS) technology provides an important guarantee for the development of implantable neural electrodes. Among them, neural probes, as an extremely important category, can accurately collect local field potentials and action potentials by penetrating into the cerebral cortex, which is of great significance for the study of neural circuit function and the diagnosis of brain lesions. However, the flexibility of neural probes is extremely demanding due to the movement of the brain caused by human motion and micromotion of internal tissues. At the same time, due to the small size of the nerve probe, the size of the electrode point is further reduced. How to ensure a lower inter...

Claims

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Application Information

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IPC IPC(8): A61B5/294A61B5/262A61B5/263A61B5/268A61B5/28A61B5/291A61B5/296A61B5/297
CPCA61B5/294A61B5/262A61B5/263A61B5/268A61B5/28A61B5/291A61B5/296A61B5/297A61B2562/164A61B2562/125A61B2562/16
Inventor 吉博文周宇昊常洪龙冯慧成张凯梁泽凯尤小丽
Owner NORTHWESTERN POLYTECHNICAL UNIV
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