Flexible photodetector based on single crystal silicon nanofilm/graphene and preparation method

Abstract

The invention discloses a flexible photodetector based on single crystal silicon nanofilm / graphene and a preparation method thereof. vinyl and top polyimide composition. Based on the excellent performance of the bulk silicon / graphene Schottky heterojunction photodetector, the present invention thins the bulk silicon to the nanometer scale, so that the originally large and hard solid silicon becomes thin, flexible and more To a large extent, after being encapsulated by the flexible packaging material polyimide, on the basis of retaining the excellent photodetection performance of the bulk silicon / graphene heterojunction, it also has the advantages of ultra-thin and flexible, combined with polyimide The high insulation and good biocompatibility greatly broaden the application fields of silicon / graphene heterojunction photodetectors, especially in the fields of biomedicine and wearable electronic devices.

Description

technical field [0001] The invention relates to the field of photodetectors, in particular to a flexible photodetector based on single crystal silicon nanofilm / graphene and a preparation method. Background technique [0002] The basic principle of the photoelectric sensor is based on the photoelectric effect. When light is irradiated on certain substances, the energy of the photons will be transferred to the electrons, which will change the state of the electrons, thereby changing the electrical properties of the substance accordingly. A device that converts optical signals into electrical signals. Photodetectors are widely used in communication, medical and health, computer technology, space technology and other fields. [0003] Single crystal silicon / graphene Schottky heterojunction photodetectors have the advantages of high sensitivity, high optical response, and fast response speed, and have important applications in high-speed signal modulation and weak signal detectio...

AI Technical Summary

Problems solved by technology

Traditional single crystal silicon / graphene Schottky heterojunction photodetectors have excellent performance, but cannot be flexible, and their application fields are greatly limited. Especially in the field of biomedicine, wearable and flexible electronic devices are showing vigorous development. Vitality; and other types of flexible photodetectors, on the one hand, the detection performance is not as good as silicon-based photodetectors, on the other hand, the manufacturing cost is high, and they cannot be compatible with the existing integrated circuit technology

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