Delay line type surface acoustic wave based sensing circuit system design method
A delay line type, sensing circuit technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, electrical components, etc. System false positives, etc.
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[0070] Such as Figure 1 to Figure 7 Shown is a design method based on the delay line surface acoustic wave sensing circuit system, including the following steps:
[0071] Step 1. Fabricate a delay line surface acoustic wave device that does not include a sensitive film:
[0072] Step 101, select the piezoelectric film layer 1, and set the input IDT 2 and the output IDT 3 on the piezoelectric film layer 1, the input IDT 2 and the output IDT The structure of the device 3 is the same, and the input IDT 2 and the output IDT 3 are arranged symmetrically with respect to the center of the piezoelectric film layer 1, and the two ends of the piezoelectric film layer 1 are coated with sound-absorbing glue 5;
[0073] Step 102: Package the delay line surface acoustic wave device obtained in step 101 with wire bonding equipment to obtain a delay line surface acoustic wave device without a sensitive film; wherein, the delay line surface acoustic wave device without a sensitive film The...
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