A design method of mine safety monitoring system based on surface acoustic wave sensor
A surface acoustic wave device and safety monitoring technology, which can be used in thermometers with physical/chemical changes, fluid analysis using sound waves/ultrasonic waves/infrasonic waves, material analysis using sound waves/ultrasonic waves/infrasonic waves, etc. It can solve the problem of low system stability , Sensing system false positives, high power consumption and other problems, to achieve the effect of increasing stability and reliability, improving load capacity and low power consumption
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[0069] like Figure 1 to Figure 5 A design method of mine safety monitoring system based on surface acoustic wave sensor shown, including the following steps:
[0070] Step 1. Fabrication of a delay line type surface acoustic wave device containing a sensitive film:
[0071] Step 101: Select the piezoelectric thin film layer 1, set the input interdigital transducer 2 and the output interdigital transducer 3 on the piezoelectric thin film layer 1, and set the input interdigital transducer 2 and the output interdigital transducer 3 on the piezoelectric thin film layer 1. A sensitive thin film layer 4 is arranged therebetween, and the bottom surface of the sensitive thin film layer 4 is attached to the surface of the piezoelectric thin film layer 1; wherein, the input interdigital transducer 2 and the output interdigital transducer 3 have the same structure , and the input interdigital transducer 2 and the output interdigital transducer 3 are symmetrically arranged with respect ...
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