A method of manufacturing microfluidic actuator

Abstract

The invention relates to a method of manufacturing microfluidic actuator, which comprises the following steps of: 1, providing a substrate, and depositing an oxidation material on the substrate to form a cavity layer; 2, depositing a nitriding material on the cavity layer to form a vibration layer; 3, depositing a metal material and a piezoelectric material on the vibration layer, and etching to form an actuating layer; 4, etching the substrate to form a plurality of flow channels; 5, depositing an oxidation material on the substrate to form a mask layer, and etching the substrate to form a plurality of connecting flow channels; 6, etching the cavity layer to form a flow storage chamber; 7, providing a pore plate layer, and etching to form a plurality of runner openings; 8, manufacturing aflow channel layer and a plurality of channels on the pore plate layer by rolling the dry film and photoetching; 9, bonding the substrate and the flow channel layer by flip chip alignment and hot pressing to form the integral structure of the microfluidic actuator.

Description

technical field [0001] This case relates to a method for manufacturing a microfluidic actuator, especially a method for manufacturing a microfluidic actuator using a microelectromechanical semiconductor process. Background technique [0002] At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, the fluid delivery included in products such as micro pumps, sprayers, inkjet heads, and industrial printing devices Structure is its key technology. [0003] With the rapid development of science and technology, the application of fluid conveying structure is becoming more and more diversified, such as industrial application, biomedical application, medical care, electronic heat dissipation, etc., and even the recent popular wearable devices can be seen. It can be seen that The traditional fluid delivery structure has gradually tended to miniaturiz...

AI Technical Summary

Problems solved by technology

[0004] In the prior art, although there is an integrally formed miniaturized fluid delivery structure using micro-electromechanical processes, the existing miniaturized fluid delivery structure often suffers from the disadvantage of too small displacement of the thin-film piezoelectric layer. The problem of insufficient dynamic fluid compression ratio makes the transmission flow too small. Therefore, how to break through its technical bottleneck with innovative miniaturized structure is an important content of development.

Images