A micro-electromechanical multi-ring gyro force balance mode measurement and control circuit system

Abstract

The invention discloses a micro-electromechanical multi-ring gyro force balance mode measurement and control circuit system, including a signal amplification circuit, etc.; two signal amplification circuits are respectively connected with two differential detection electrodes of the gyroscope; The signal amplification circuit is connected; the digital phase-locked loop circuit is connected with the first analog-digital conversion module; the digital amplitude control circuit is connected with the first analog-digital conversion module; the digital quadrature suppression circuit is connected with the second analog-digital conversion module; The digital force balance control circuit is connected to the second analog-to-digital conversion module; the three-way digital-to-analog conversion module is connected to the digital amplitude control circuit, the digital quadrature suppression circuit, and the digital force balance control circuit, and is respectively connected to the driving electrode of the gyroscope, the positive The AC suppression electrode is connected; the tuning module is connected to the tuning electrode of the gyroscope. The invention can effectively realize the gyro force balance working mode, output the gyro rotation angular velocity, and improve the control precision and stability of the gyro.

Description

technical field [0001] The invention belongs to the microelectromechanical field, in particular to a microelectromechanical multi-ring gyroscope force balance mode measurement and control circuit system. Background technique [0002] Micro-electromechanical multi-ring gyroscope, as a kind of solid wave gyroscope, adopts single crystal silicon as the main processing material. Because it is processed by mature micro-electro-mechanical technology, it has most of the advantages of micro-electro-mechanical gyroscope; at the same time, as a kind of solid wave gyroscope, Compared with the mass block MEMS gyroscope, it has the advantages of small energy dissipation, high mechanical sensitivity, mass concentration, and low mechanical noise. Because of the above advantages, MEMS multi-ring gyroscopes occupy an important position in the field of MEMS gyroscopes. [0003] In practical applications, most MEMS multi-loop gyro control systems adopt full analog control or semi-digital cont...

AI Technical Summary

Problems solved by technology

This control method has disadvantages such as low control precision, poor temperature adaptability, poor anti-interference ability, difficult debugging and maintenance, and complex structure.

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