A piezo-actuated microactuator for a low-orbit satellite microfluidic system

Abstract

The invention discloses a piezoelectric actuated micro-driver of a low-orbit satellite microfluidic control system, which is used to solve the problems of heat dissipation and precise fuel control of low-orbit satellite electronic equipment, including a PCB pump body and a piezoelectric single crystal actuator. The PCB pump body is made by PCB processing, the piezoelectric single crystal actuator includes piezoelectric ceramics and a copper substrate, and the piezoelectric ceramics is bonded above the copper substrate; the middle of the PCB pump body is downward A counterbore is provided, the copper substrate is welded on the PCB pump body, the counterbore of the PCB pump body and the copper substrate form a pump cavity, and the PCB pump body has a liquid inlet and a liquid outlet , the liquid inlet and the liquid outlet are in communication with the pump chamber, the lower bottom surface of the pump chamber is inclined, and the height of the liquid inlet in the vertical direction is higher than that of the liquid outlet. The piezoelectric actuated micro-driver reduces the difficulty of integrating it with other components of the microfluidic control system, makes the microdriver directly act on the microfluidic channel, and improves the control capability of the microdriver and the integration degree of the system.

Description

technical field [0001] The invention relates to the technical field of microfluidic machinery, in particular to a piezoelectric actuated microdriver for a low-orbit satellite microfluidic control system. Background technique [0002] As a power component of the low-orbit satellite microfluidic system, the micro-driver plays a role in controlling the flow and flow direction of the fluid in the microchannel, and then achieves the ability to control the performance of the propulsion system and the liquid cooling system. [0003] At present, the driving method of microfluidic system is generally driven by external micro-driver, which requires external power lines for driving the micro-driver and pipelines for conveying coolant, which makes the integration of the whole system low, and there are relatively large The large pressure loss reduces the driving force and control ability of the micro-driver, and cannot be applied to the low-orbit satellite microfluidic system. In order ...

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Problems solved by technology

[0004] So far, scholars from various countries have not proposed an effective solution on how to integrate the micro-actuator with other components of microfluidics, and the micro-actuator still has the problems of weak control ability and low integration degree in the system.

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